Chinese Journal of Lasers, Volume. 32, Issue 5, 685(2005)

A High-Reflectivity Al2O3/MgF2 Mirrors for 193 nm

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    References(11)

    [1] [1] Glen P. Callahan, Bruce K. Flint. Characteristics of deep UV optics at 193 nm & 157 nm[C]. SPIE, 1998, 3578: 45~52

    [3] [3] O. Apel, K. Mann, J. Heber et al.. Nonlinear absorption phenomena in oxide coatings for 193 nm[C]. SPIE, 2000, 3902: 235~241

    [4] [4] Oliver Apel, Klaus Mann, Alfons Zoeller et al.. Nonlinear absorption of thin Al2O3 film at 193 nm[J]. Appl. Opt., 2000, 39(18): 3165~3169

    [6] [6] Josep Ferre-Borrull, Angela Duparre, Etienne Quesnel. Roughness and light scattering of ion-beam-sputtered fluoride coatings for 193 nm [J]. Appl. Opt., 2000, 39(31): 5854~5865

    [7] [7] Stefan Gliech, Jorg Steinert, Angela Duparre. Light-scattering measurements of optical thin-film components at 157 and 193 nm[J]. Appl. Opt., 2002, 41(16): 3224~3234

    [8] [8] J. C. Manifacier, J. Gasiot, J. P. Fillard. A simple method for the determination of the optical constant n, k and the thickness of a weakly absorbing thin film[J]. J. Phys. E. Scientific Instruments, 1976, 9(11): 1002~1004

    [9] [9] Joseph F. Hall, Jr., W.F.C. Ferguson. Optical properties of cadmium sulfide and zinc sulfide from 0.6 micron to 14 microns[J]. J. Opt. Soc. Am., 1955, 45(9): 714~718

    [10] [10] Philippe Torchio, Alexandre Gatto, Marco Alvisi et al.. High-reflectivity HfO2/SiO2 ultraviolet mirrors[J]. Appl. Opt., 2002, 41(16): 3256~3261

    [12] [12] Wen-Hsiang Wang, Shiuh Chao. Annealing effect on ion-beam-sputtered titanium dioxide film[J]. Opt. Lett., 1998, 23(18): 1417~1419

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    CLP Journals

    [1] Xue Chunrong, Yi Kui, Shao Jianda, Fan Zhengxiu. 193 nm Fluoride High Reflection Mirror[J]. Chinese Journal of Lasers, 2010, 37(8): 2068

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A High-Reflectivity Al2O3/MgF2 Mirrors for 193 nm[J]. Chinese Journal of Lasers, 2005, 32(5): 685

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    Paper Information

    Category: materials and thin films

    Received: May. 11, 2004

    Accepted: --

    Published Online: Jun. 1, 2006

    The Author Email: (shangshuzhen@siom.ac.cn)

    DOI:

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