Analysis and Metrology of Reproducibility of High-Precision Optic Mount

Wang Hui; Zhou Feng; Wang Liping; Yu Jie; Jin Chunshui

doi:10.3788/cjl201340.1208001

Chinese Journal of Lasers, Volume. 40, Issue 12, 1208001(2013)

Analysis and Metrology of Reproducibility of High-Precision Optic Mount

Wang Hui^*, Zhou Feng, Wang Liping, Yu Jie, and Jin Chunshui

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References(10)

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[7] [7] Wang Rudong, Tian Wei, Wang Ping, et al.. Analysis of vibration effect to surface figure measurement[J]. Acta Optica Sinica, 2012, 32(11): 1112001.

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[10] [10] Wang Hui, Yu Jie, Zhou Feng, et al.. Development of the mirror mount for the ultra-high reproducibility metrology[J]. Chinese J Lasers, 2012, 39(11): 1108008.

CLP Journals

[1] Jia Shuqiang, Huang Wei, Xu Xiangru, Yao Changcheng. Compensation Effect of Radial Preload on Mirror Deformation Caused by Gravity[J]. Acta Optica Sinica, 2016, 36(4): 422006

[2] Wu Zhihui, Wang Dongping, Hua Yangyang, Ni Mingyang, Dong Lijian. Influence of Adjustable Supporting Force on Surface Shape of Optical Element[J]. Laser & Optoelectronics Progress, 2015, 52(12): 122201

[3] Hou Xi, Zhang Shuai, Hu Xiaochuan, Quan Haiyang, Wu Gaofeng, Jia Xin, He Yiwei, Chen Qiang, Wu Fan. The research progress of surface interferometric measurement with higher accuracy[J]. Opto-Electronic Engineering, 2020, 47(8): 200209

[4] Quan Haiyang, Hou Xi, Wu Fan. Research Status and Progress of Measurement Uncertainty in Interferometric Testing of Surface Figure[J]. Laser & Optoelectronics Progress, 2015, 52(6): 60004

[5] Wang Jun, Jin Chunshui, Wang Liping, Guo Benyin, Yu Bo. Foundation and Application of Model for Multilayers Analysis in Extreme Ultra-Violet Lithography Projection[J]. Acta Optica Sinica, 2014, 34(8): 811002

[6] Fang Bin, Tian Wei, Wang Rudong, Zhu Yan, Zhang Yongkai, Wang Fei. Key Technique in Supporting of Φ 300 mm Aperture Reference Flat Mirror[J]. Laser & Optoelectronics Progress, 2015, 52(9): 92203

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Wang Hui, Zhou Feng, Wang Liping, Yu Jie, Jin Chunshui. Analysis and Metrology of Reproducibility of High-Precision Optic Mount[J]. Chinese Journal of Lasers, 2013, 40(12): 1208001

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Paper Information

Category: measurement and metrology

Received: Jul. 2, 2013

Accepted: --

Published Online: Oct. 20, 2013

The Author Email: Hui Wang (wangh-19850322@163.com)

DOI:10.3788/cjl201340.1208001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology