Laser & Optoelectronics Progress, Volume. 57, Issue 5, 053003(2020)

Micro-Ultraviolet Spectrometer Analysis System

Liangkun Huang1,2、*, Quan Wen1,2、**, Zhiyu Wen1,2, Fan Yu1,2, Haitao Liu2, Mingjian Hong2, and Yingke Xie1,2
Author Affiliations
  • 1Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China
  • 2Microsystem Research Center, Chongqing University, Chongqing 400044, China
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    Figures & Tables(10)
    Schematic of analyzing process
    Simulation results of the flat field holographic concave grating
    Schematic of spectral analysis system configuration
    Spectral range and calibration results of the spectrometer prototype. (a) Wavelength range; (b) calibrated spectral curve
    Hg lamp resolution test curve
    Test results of system stability. (a) 12 sets of test data chart; (b) 12 h test data scatter chart
    Gas detection and analysis system. (a) Physical picture of test system; (b) deuterium lamp-ultraviolet spectrometer measurement system
    Absorption spectrum of SO2 gas and filtered SO2 differential absorption cross section at 215-238 nm and 290-311 nm
    • Table 1. Test data of wavelength accuracy

      View table

      Table 1. Test data of wavelength accuracy

      Theoreticalwavelength /nmMeasuredwavelength /nmRelativeerror /nm
      253.65253.58-0.07
      265.37265.32-0.05
      275.28275.280
      289.36289.29-0.07
      296.73296.64-0.09
      302.15302.11-0.04
      312.57312.670.1
      334.15334.08-0.07
      365.01365.040.03
    • Table 2. Measurement results of SO2 gas mass concentration in UV spectrometer

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      Table 2. Measurement results of SO2 gas mass concentration in UV spectrometer

      GasconcentrationActual concentration /(mg·m-3)Max value /(mg·m-3)Min value /(mg·m-3)Avg value /(mg·m-3)Wave /%Error /%
      Concentration of SO22020.267819.466920.00340.800.53
      3030.081429.479629.80160.600.52
      5050.391449.727349.94890.660.39
      8080.121579.602279.93030.520.40
      100100.369599.438999.93560.930.56
      Concentration of N20.3905-0.33120.0280.720.39
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    Liangkun Huang, Quan Wen, Zhiyu Wen, Fan Yu, Haitao Liu, Mingjian Hong, Yingke Xie. Micro-Ultraviolet Spectrometer Analysis System[J]. Laser & Optoelectronics Progress, 2020, 57(5): 053003

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    Paper Information

    Category: Spectroscopy

    Received: Aug. 1, 2019

    Accepted: Sep. 6, 2019

    Published Online: Mar. 5, 2020

    The Author Email: Huang Liangkun (huang_lk@cqu.edu.cn), Wen Quan (Quan.Wen@enas.fraunhofer.de)

    DOI:10.3788/LOP57.053003

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