Regulation on microstructural and optical properties of Sb<sub>2</sub>Te<sub>3</sub> films induced by titanium doping

Yuan-Jie LIAO; Yao-Peng LI; Xiao-Xiao SONG; Xin-Tong ZHANG; Shu-Bo ZHANG; Teng-Fei ZHANG; Meng-Qi LUY; Zhen LIU; Yi-Yun ZOU; Ye ZHANG; Er-Tao HU; Jing LI

doi:10.11972/j.issn.1001-9014.2022.06.011

Journal of Infrared and Millimeter Waves, Volume. 41, Issue 6, 1022(2022)

Regulation on microstructural and optical properties of Sb₂Te₃ films induced by titanium doping

Yuan-Jie LIAO¹, Yao-Peng LI¹, Xiao-Xiao SONG¹, Xin-Tong ZHANG¹, Shu-Bo ZHANG¹, Teng-Fei ZHANG¹, Meng-Qi LUY¹, Zhen LIU¹, Yi-Yun ZOU¹, Ye ZHANG¹, Er-Tao HU^2、*, and Jing LI^1,3、**

Author Affiliations

¹Department of Optical Science and Engineering，Shanghai Ultra-Precision Optical Manufacturing Engineering Center，Fudan University，Shanghai 200438，China

²College of Electronic and Optical Engineering，Nanjing University of Posts and Telecommunications，Nanjing 210023，China

³Key Laboratory of Micro and Nano Photonic Structures（Ministry of Education），Fudan University，Shanghai 200433，China

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Fig. 1. XRD patterns of the Ti-doped Sb₂Te₃ thin films

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Fig. 2. XPS spectra of the Ti-doped Sb₂Te₃ films（a）Sb 3d，（b）Te 3d，（c）Ti 2p

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$(a) Transmittance and (b) refractive index curves of the Ti-doped Sb2Te3 thin films$

Fig. 3. (a) Transmittance and (b) refractive index curves of the Ti-doped Sb₂Te₃ thin films

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Fig. 4. The optical band gaps of the Ti-doped Sb₂Te₃ thin films (a) S1, (b) S2, (c) S3, (d) S4

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Fig. 5. The normalized transmittance curves of the Ti-doped Sb₂Te₃ thin films（a）S1，（b）S2，（c）S3，（d）S4

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Fig. 6. Absolute value of the nonlinear absorption coeﬃcient $β$ and damage threshold of the Ti-doped Sb₂Te₃ thin films with different doping concentration

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Fig. 7. Normalized transmittance curves of the amorphous and crystalline Sb₂Te₃ thin films

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Table 1. The sputtering power and time of Ti-doped Sb₂Te₃thin films
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Table 1. The sputtering power and time of Ti-doped Sb₂Te₃thin films
Sample Number Sb₂Te₃ Power /W Ti Power /W Sputtering Time/s
S1 80 0 125
S2 80 30 125
S3 80 40 125
S4 80 50 125

Table 2. The thickness and the Ti atomic ratios of Ti-doped Sb₂Te₃ thin films
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Table 2. The thickness and the Ti atomic ratios of Ti-doped Sb₂Te₃ thin films
Sample Number Ti Target Power /W Ti（Atomic %） Thickness/nm
S1 0 0 61.42
S2 30 4.00 62.29
S3 40 5.37 65.87
S4 50 6.64 67.03

Table 3. Effect of Ti doping on the structural parameters of the Ti-doped Sb₂Te₃ films
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Table 3. Effect of Ti doping on the structural parameters of the Ti-doped Sb₂Te₃ films
Sample Ti（Atomic %） Crystallite Size /nm Lattice Strain（10^-3） Dislocation Density（1/D² 10^-4 nm^-2）
S1 0 37.34 6.07 7.17
S2 4.00 31.39 7.22 10.14
S3 5.37 25.40 8.93 15.49
S4 6.64 20.58 11.02 23.59

Table 4. Nonlinear absorption coefficient and Damage Threshold of the Ti-doped Sb₂Te₃ thin films
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Table 4. Nonlinear absorption coefficient and Damage Threshold of the Ti-doped Sb₂Te₃ thin films
Sample Ti（Atomic %） $L_{e f f}$ /nm $β$ （ $c m / G W$ ） Damage Threshold（ $G W / c m^{2}$ ）
S1-AM 0 16.89 -507.4 -
S1 0 16.91 -3 044.6 188.6
S2 4.00 16.63 -8 247.5 204.4
S3 5.37 17.31 -4 952.3 221.6
S4 6.64 16.94 -1 246.6 265.5

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Yuan-Jie LIAO, Yao-Peng LI, Xiao-Xiao SONG, Xin-Tong ZHANG, Shu-Bo ZHANG, Teng-Fei ZHANG, Meng-Qi LUY, Zhen LIU, Yi-Yun ZOU, Ye ZHANG, Er-Tao HU, Jing LI. Regulation on microstructural and optical properties of Sb₂Te₃ films induced by titanium doping[J]. Journal of Infrared and Millimeter Waves, 2022, 41(6): 1022

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Paper Information

Category: Research Articles

Received: Jun. 16, 2022

Accepted: --

Published Online: Feb. 6, 2023

The Author Email: Er-Tao HU (iamethu@njupt.edu.cn), Jing LI (lijing@fudan.edu.cn)

DOI:10.11972/j.issn.1001-9014.2022.06.011

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. The sputtering power and time of Ti-doped Sb2Te3 thin films

Table 1. The sputtering power and time of Ti-doped Sb2Te3 thin films

Table 2. The thickness and the Ti atomic ratios of Ti-doped Sb2Te3 thin films

Table 2. The thickness and the Ti atomic ratios of Ti-doped Sb2Te3 thin films

Table 3. Effect of Ti doping on the structural parameters of the Ti-doped Sb2Te3 films

Table 3. Effect of Ti doping on the structural parameters of the Ti-doped Sb2Te3 films

Table 4. Nonlinear absorption coefficient and Damage Threshold of the Ti-doped Sb2Te3 thin films

Table 4. Nonlinear absorption coefficient and Damage Threshold of the Ti-doped Sb2Te3 thin films

Table 1. The sputtering power and time of Ti-doped Sb₂Te₃thin films

Table 1. The sputtering power and time of Ti-doped Sb₂Te₃thin films

Table 2. The thickness and the Ti atomic ratios of Ti-doped Sb₂Te₃ thin films

Table 2. The thickness and the Ti atomic ratios of Ti-doped Sb₂Te₃ thin films

Table 3. Effect of Ti doping on the structural parameters of the Ti-doped Sb₂Te₃ films

Table 3. Effect of Ti doping on the structural parameters of the Ti-doped Sb₂Te₃ films

Table 4. Nonlinear absorption coefficient and Damage Threshold of the Ti-doped Sb₂Te₃ thin films

Table 4. Nonlinear absorption coefficient and Damage Threshold of the Ti-doped Sb₂Te₃ thin films