Position sensor based on slit imaging

Chinese Optics Letters, Volume. 2, Issue 9, 09520(2004)

Aijun Zeng, Xiangzhao Wang, Yang Bu, and Dailin Li

Author Affiliations

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

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References(6)

[1] [1] X. D. Liu and Y. Z. Gu, Proc. SPIE 3897, 214 (1999).

[2] [2] R. G. Dorsch, G. Hausler, and J. M. Herrmann, Appl. Opt. 33, 1306 (1994).

[3] [3] X. F. Zhang, B. G. Wang, and C. Z. Jiang, Opt. Technique (in Chinese) 27, 362 (2001).

[4] [4] Z. H. Huang, H. Y. Cai, H. Q. Li, and Y. M. Zhang, Opto-Electron. Eng. (in Chinese) 29, 58 (2002).

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Aijun Zeng, Xiangzhao Wang, Yang Bu, Dailin Li, "Position sensor based on slit imaging," Chin. Opt. Lett. 2, 09520 (2004)

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: May. 11, 2004

Accepted: --

Published Online: Jun. 6, 2006

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