International Journal of Extreme Manufacturing, Volume. 7, Issue 3, 35504(2025)
Electrically reconfigurable surface acoustic wave phase shifters based on ZnO TFTs on LiNbO3 substrate
[1] [1] Yang Y S, Gao L Q and Gong S B 2022 Surface-acoustic-wave devices based on lithium niobate and amorphous silicon thin films on a silicon substrateIEEE Trans. Microw. Theory Tech.705185–94
[2] [2] Zhang Y, Zhou J, Xie Y, Tang C Y, Zou Y, Tovstopyat A, Yu H Y and Sun C L 2020 Dual-mode hybrid quasi-SAW/BAW resonators with high effective coupling coefficientIEEE Trans. Ultrason. Ferroelectr. Freq. Control671916–21
[3] [3] Stelzer A, Pichler M, Scheiblhofer S and Schuster S 2004 Identification of SAWID-tags using an FSCW interrogation unit and model-based evaluationIEEE Trans. Ultrason. Ferroelectr. Freq. Control511412–20
[4] [4] Su R Xet al2022 Scaling surface acoustic wave filters on LNOI platform for 5G communicationProc. 2022 Int. Electron Devices Meeting(IEEE) pp 4.2.1–4
[5] [5] Zheng P C, Zhang S B, Wu J B, Zhang L P, Yao H L, Fang X L, Chen Y, Huang K and Ou X 2024 Near 5-GHz longitudinal leaky surface acoustic wave devices on LiNbO3/SiC substratesIEEE Trans. Microw. Theory Tech.721480–8
[6] [6] Satzinger K Jet al2018 Quantum control of surface acoustic-wave phononsNature563661–5
[7] [7] Shao L B, Zhu D, Colangelo M, Lee D, Sinclair N, Hu Y W, Rakich P T, Lai K J, Berggren K K and Lonar M 2022 Electrical control of surface acoustic wavesNat. Electron.5348–55
[8] [8] Manenti R, Kockum A F, Patterson A, Behrle T, Rahamim J, Tancredi G, Nori F and Leek P J 2017 Circuit quantum acoustodynamics with surface acoustic wavesNat. Commun.8975
[9] [9] Shao L B, Mao W B, Maity S, Sinclair N, Hu Y W, Yang L and Lonar M 2020 Non-reciprocal transmission of microwave acoustic waves in nonlinear parity–time symmetric resonatorsNat. Electron.3267–72
[10] [10] Zhang Y, Cai Y, Zhou J, Xie Y, Xu Q W, Zou Y, Guo S S, Xu H X, Sun C L and Liu S 2020 Surface acoustic wave-based ultraviolet photodetectors: a reviewSci. Bull.65587–600
[11] [11] Fu Y Q, Luo J K, Du X Y, Flewitt A J, Li Y, Markx G H, Walton A J and Milne W I 2010 Recent developments on ZnO films for acoustic wave based bio-sensing and micro fluidic applications: a reviewSens. ActuatorsB143606–19
[12] [12] Chang K, Pi Y, Liu W P, Wang F, Pan F, Li F K, Jia S R, Shi J F, Deng S L and Chen M 2014 Label-free and high-sensitive detection of human breast cancer cells by aptamer-based leaky surface acoustic wave biosensor arrayBiosens. Bioelectron.60318–24
[13] [13] Liu Y H, Zhou J, Ji Z B, Zhuo F L, Wen S Y, Chen Y Q, Fu Y Q and Duan H G 2023 5.7 GHz ultrasensitive shear horizontal-surface acoustic wave humidity sensor based on LiNbO3/SiO2/SiC heterostructures with a sensitive layer of polyethyleneimine-SiO2 nanocompositesACS Appl. Mater. Interfaces1535422–9
[14] [14] Kang K M, Um J S, Park J C and Jeong B J 2015 A design approach of radio frequency module for TV white space based on filter bankProc. 2015 IEEE Int. Conf. Consumer Electronics(IEEE) pp 224–5
[15] [15] Zhu J H, Emanetoglu N W, Lu Y C, Kosinski J A and Pastore R A 2001 A multi-IDT input tunable surface acoustic wave filterIEEE Trans. Ultrason. Ferroelectr. Freq. Control481383–8
[16] [16] Doberstein S 2010 Switchable low-loss SAW filter banks with MEMS switchesProc. 2010 IEEE. Int. Ultrasonics Symp.(IEEE) pp 1294–7
[17] [17] Liu J S, Liu J L, Li S Z, He S T, Liang Y and Li H L 2008 Switchable low loss SAW filter bank with SAW notch filtersProc. 2008 IEEE Ultrasonics. Symp.(IEEE) pp 1600–2
[18] [18] Elhosni Met al2016 Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validationSens. ActuatorsA24041–49
[19] [19] Kumar P, Vinita, Pawar S, Singh J and Kaur D 2022 Magnetic field tunable ferromagnetic shape memory alloy-based SAW resonatorIEEE Electron. Device Lett.43446–9
[20] [20] Cho Y and Yamanouchi K 1987 Nonlinear, elastic, piezoelectric, electrostrictive, and dielectric constants of lithium niobateJ. Appl. Phys.61875–87
[21] [21] Taylor J C, Chatterjee E, Kindel W F, Soh D and Eichenfield M 2022 Reconfigurable quantum phononic circuits via piezo-acoustomechanical interactionsnpj Quantum Inf.819
[22] [22] Verba R, Bankowski E N, Meitzler T J, Tiberkevich V and Slavin A 2021 Phase nonreciprocity of microwave-frequency surface acoustic waves in hybrid heterostructures with magnetoelastic couplingAdv. Electron. Mater.72100263
[23] [23] Bandhu L and Nash G R 2016 Controlling the properties of surface acoustic waves using grapheneNano Res.9685–91
[24] [24] Ingebrigtsen K A 1970 Linear and nonlinear attenuation of acoustic surface waves in a piezoelectric coated with a semiconducting filmJ. Appl. Phys.41454–9
[25] [25] Hackett L, Miller M, Weatherred S, Arterburn S, Storey M J, Peake G, Dominguez D, Finnegan P S, Friedmann T A and Eichenfield M 2023 Non-reciprocal acoustoelectric microwave amplifiers with net gain and low noise in continuous operationNat. Electron.676–85
[26] [26] Rotter M, Wixforth A, Govorov A O, Ruile W, Bernklau D and Riechert H 1999 Nonlinear acoustoelectric interactions in GaAs/LiNbO3 structuresAppl. Phys. Lett.75965–7
[27] [27] Hutson A R and White D L 1962 Elastic wave propagation in piezoelectric semiconductorsJ. Appl. Phys.3340–47
[28] [28] Li Ret al2018 Tunable surface acoustic wave device using semiconducting MgZnO and piezoelectric NiZnO dual-layer structure on glassSmart Mater. Struct.27085025
[29] [29] Bahamonde J A and Kymissis I 2020 A reconfigurable surface acoustic wave filter on ZnO/AlGaN/GaN heterostructureIEEE Trans. Electron. Device674507–14
[30] [30] Li R, Reyes P I, Ragavendiran S, Shen H and Lu Y C 2015 Tunable surface acoustic wave device based on acoustoelectric interaction in ZnO/GaN heterostructuresAppl. Phys. Lett.107073504
[31] [31] Li R, Reyes P I, Li G Y, Tang K, Yang K Y, Wang S Y, Han J J, Emanetoglu N W and Lu Y C 2017 Tunable SAW devices based on Ni: ZnO/ZnO/GaN structures with buried IDTsECS J. Solid State Sci. Technol.6S3119–24
[32] [32] Zhu J, Chen Y, Saraf G, Emanetoglu N W and Lu Y C 2006 Voltage tunable surface acoustic wave phase shifter using semiconducting/piezoelectric ZnO dual layers grown onr-Al2O3Appl. Phys. Lett.89103513
[33] [33] Pedrs J, Calle F, Cuerdo R, Grajal J and Bougrioua Z 2010 Voltage tunable surface acoustic wave phase shifter on AlGaN/GaNAppl. Phys. Lett.96123505
[34] [34] Zhu H S and Rais-Zadeh M 2017 Non-reciprocal acoustic transmission in a GaN delay line using the acoustoelectric effectIEEE Electron Device Lett.38802–5
[35] [35] Ghosh S, Hollis M A and Molnar R J 2019 Acoustoelectric amplification of Rayleigh waves in low sheet density AlGaN/GaN heterostructures on sapphireAppl. Phys. Lett.114063502
[36] [36] Rotter M, Ruile W, Wixforth A and Kotthaus J P 1999 Voltage controlled SAW velocity in GaAs/LiNbO3-hybridsIEEE Trans. Ultrason. Ferroelectr. Freq. Control46120–5
[37] [37] Crowley J D, Weller J F and Giallorenzi T G 1977 Acoustoelectric SAW phase shifterAppl. Phys. Lett.31558–60
[38] [38] Yu X G, Marks T J and Facchetti A 2016 Metal oxides for optoelectronic applicationsNat. Mater.15383–96
[39] [39] Fortunato E, Barquinha P and Martins R 2012 Oxide semiconductor thin-film transistors: a review of recent advancesAdv. Mater.242945–86
[40] [40] Shi J L, Zhang J Y, Yang L, Qu M, Qi D C and Zhang K H L 2021 Wide bandgap oxide semiconductors: from materials physics to optoelectronic devicesAdv. Mater.332006230
[41] [41] Ahn C H, Woo C H, Hwang S, Lee J Y, Cho H K, Cho H J and Yeom G Y 2010 Influence of active layer thickness and annealing in zinc oxide TFT grown by atomic layer depositionSurf. Interface Anal.42955–8
[42] [42] zgr , Hofstetter D and Morko H 2010 ZnO devices and applications: a review of current status and future prospectsProc. IEEE981255–68
[43] [43] Du X Yet al2007 ZnO film for application in surface acoustic wave deviceJ. Phys.: Conf. Ser.76012035
[44] [44] Ye Z, Xu H, Liu T F, Liu N, Wang Y, Zhang N and Liu Y 2017 Highly stable atomic layer deposited zinc oxide thin-film transistors incorporating triple O2 annealingIEEE Trans. Electron. Devices644114–22
[45] [45] Zhang N, Zhao W P, Zhang X Y, Liu Y, Dong S R, Luo J K and Ye Z 2022 Transparent floating gate memory based on ZnO thin film transistor with controllable memory windowIEEE J. Electron. Devices Soc.10275–80
[46] [46] Li H J, Han D D, Yi Z, Dong J C, Zhang S D, Zhang X and Wang Y 2019 High-performance ZnO thin-film transistors prepared by atomic layer depositionIEEE Trans. Electron. Devices662965–70
[47] [47] Eckstein S G 1964 Acoustoelectric effectJ. Appl. Phys.352702–7
[48] [48] Adler R 1971 Simple theory of acoustic amplificationIEEE Trans. Sonics Ultrason.18115–8
[49] [49] Hashimoto K Y, Asano H, Matsuda K, Yokoyama N, Omori T and Yamaguchi M 2004 Wideband Love wave filters operating in GHz range on Cu-grating/rotated-YX-LiNbO3-substrate structureProc. IEEE Ultrasonics. Symp. 2004(IEEE) pp 1330–4
[50] [50] Xu H P, Fu S L, Shen J Y, Lu Z T, Su R X, Wang R, Song C, Zeng F, Wang W B and Pan F 2022 Large-range spurious mode elimination for wideband SAW filters on LiNbO3/SiO2/Si platform by LiNbO3 cut angle modulationIEEE Trans. Ultrason. Ferroelectr. Freq. Control693117–25
[51] [51] Naumenko N and Abbott B 2008 Optimal cut of lithium niobate with suppressed Rayleigh-type mode for application in resonator SAW filtersProc. 2008 IEEE Ultrasonics. Symp.(IEEE) pp 1013–7
[52] [52] Kawamura Y, Horita M and Uraoka Y 2010 Effect of post-thermal annealing of thin-film transistors with ZnO channel layer fabricated by atomic layer depositionJpn. J. Appl. Phys.4904DF19
[53] [53] Janotti A and de Walle Cg V 2007 Hydrogen multicentre bondsNat. Mater.644–47
[54] [54] Park H K, Jo J, Hong H K and Heo J 2014 Influence of post-deposition annealing on the electrical properties of zinc oxide thin filmsThin Solid Films57322–26
[55] [55] Ye Z, Lu L and Wong M 2012 Zinc-oxide thin-film transistor with self-aligned source/drain regions doped with implanted boron for enhanced thermal stabilityIEEE Trans. Electron. Devices59393–9
[56] [56] Makkonen T, Plessky V P, Steichen W, Chamaly S, Poirel C, Solal M and Salomaa M M 2003 Properties of LLSAW on YZ-cut LiNbO3: modeling and experimentProc. IEEE Symp. On Ultrasonics 2003(IEEE) pp 613–6
[57] [57] Hashimoto K Y 2000Surface Acoustic Wave Devices in Telecommunications(Springer)
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Zhang Yi, Xiong Zilong, He Lewei, Jiang Yang, Deng Chenkai, Du Fangzhou, Wen Kangyao, Tang Chuying, Hu Qiaoyu, Li Mujun, Wang Xiaohui, Wang Wenhui, Wang Han, Wang Qing, Yu Hongyu, Wang Zhongrui. Electrically reconfigurable surface acoustic wave phase shifters based on ZnO TFTs on LiNbO3 substrate[J]. International Journal of Extreme Manufacturing, 2025, 7(3): 35504
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Received: Mar. 30, 2024
Accepted: Sep. 29, 2025
Published Online: Sep. 29, 2025
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