Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Acta Optica Sinica, Volume. 43, Issue 15, 1506001(2023)

Optical Fiber Pressure Sensor Based on Sapphire Wafers Processed by Femtosecond Laser

Yi Jiang1,2、*, Yutong Zhang1,2,3, and Hui Deng1,2
Author Affiliations
  • 1School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 2Key Laboratory of Photonic Information Technology, Ministry of Industry and Information Technology, Beijing 100081, China
  • 3School of Physical Science and Technology, Baotou Teachers' College, Baotou 014030, Inner Mongolia, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (9)
    Equations (0)
    References (22)
    Cited By (3)
    Tools
    Paper Information
    Topics
    Figures & Tables(9)
    Schematic diagram of sensor head

    Fig. 1. Schematic diagram of sensor head

    Download full size
    Sensor fabrication. (a) Sapphire wafer processed by femtosecond laser; (b) micrograph of cutting edge

    Fig. 2. Sensor fabrication. (a) Sapphire wafer processed by femtosecond laser; (b) micrograph of cutting edge

    Download full size
    Bonded sensor. (a) Sapphire pressure probe; (b) sensor package

    Fig. 3. Bonded sensor. (a) Sapphire pressure probe; (b) sensor package

    Download full size
    Signal demodulation process. (a) Reflection spectrum of sensor; (b) frequency spectrum (solid line) and Gaussian windows (short dashed line and long dashed line); (c) temperature cavity signal after inverse Fourier transform; (d) pressure cavity signal after inverse Fourier transform

    Fig. 4. Signal demodulation process. (a) Reflection spectrum of sensor; (b) frequency spectrum (solid line) and Gaussian windows (short dashed line and long dashed line); (c) temperature cavity signal after inverse Fourier transform; (d) pressure cavity signal after inverse Fourier transform

    Download full size
    Pressure response of 0-30 MPa

    Fig. 5. Pressure response of 0-30 MPa

    Download full size
    Test system for pressure response at high temperature

    Fig. 6. Test system for pressure response at high temperature

    Download full size
    Pressure response at high temperature. (a) Pressure test within range of 25-700 ℃; (b) sensitivity changes with temperature; (c) three-dimensional diagram of cavity length, temperature, and pressure

    Fig. 7. Pressure response at high temperature. (a) Pressure test within range of 25-700 ℃; (b) sensitivity changes with temperature; (c) three-dimensional diagram of cavity length, temperature, and pressure

    Download full size
    Temperature response

    Fig. 8. Temperature response

    Download full size
    Fluctuation of optical cavity length at 10 MPa pressure

    Fig. 9. Fluctuation of optical cavity length at 10 MPa pressure

    Download full size
    Tools

    Get Citation

    Copy Citation Text

    Yi Jiang, Yutong Zhang, Hui Deng. Optical Fiber Pressure Sensor Based on Sapphire Wafers Processed by Femtosecond Laser[J]. Acta Optica Sinica, 2023, 43(15): 1506001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Mar. 29, 2023

    Accepted: May. 5, 2023

    Published Online: Jul. 28, 2023

    The Author Email: Jiang Yi (bitjy@bit.edu.cn)

    DOI:10.3788/AOS230732

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology