Acta Optica Sinica, Volume. 23, Issue 4, 480(2003)
Morphology Analysis of Titanic Thin Film Prepared by Ion Beam Sputtering
[1] [1] Family F. Dynamic scaling and phase transitions in interface growth. Phys. (A), 1990, 168(1~3):561~580
[2] [2] Godriche C. Solids Far From Equilibrium: Growth Morphology and Defects. New York: Cambridge University Press, 1991. 432, 479
[3] [3] Peto G, Molnar G L, Paszti Z et al.. Electronic structure of gold nanoparticles deposited on SiO/x/Si(100). Materials Sci. and Engng. (C), 2002, 19(1~2 ):95~99
[4] [4] Notz R, Ziemann P, Koslowski Berndt. Epitaxial growth of iridium on strontium-titanate (0 0 1) studied by in situ scanning tunneling microscopy. Surface Sci., 2002, 496(3):153~159
[5] [5] Deineka A G,Tarasenko A A, Jastrabik L et al.. Ellipsometric study of W thin films deposited on Si. Thin Solid Films, 1999, 339(1~2):216~219
[6] [6] Klett A, Freudenstein R, Plass M F et al.. Stress of c-BN thin films: A parameter investigation. Surface and Coatings Technol., 1999, 116~119:86~92
[7] [7] Ulyanenkov A, Matsuo R, Omote K et al.. X-ray scattering study of interfacial roughness correlation in Mo/Si multilayers fabricated by ion beam sputtering. J. Appl. Phys., 2000, 87(10):7255~7260
[8] [8] Chiarello R, Panella V, Krim J. X-ray reflectivity and adsorption isotherm study of fractal scaling in vapor-deposited films. Phys. Rev. Lett., 1991, 67(24):3408~3411
[9] [9] Sinha S K, Sirota E B, Garoff S. X-ray and neutron scattering from rough surfaces. Phys. Rev. (B), 1988, 38(4):2297~2331
[10] [10] He Y L, Yang H N, Lu T M et al.. Measurements of dynamic scaling from epitaxial growth front: Fe film on Fe(001). Phys. Rev. Lett., 1992, 69(26):3770~3773
[11] [11] Wang Zhuo, Sun Daliang, Hu Jifan et al.. The reactive ion etching of Bi/2Ti/2O/7 thin films on silicon substrates and its image in atomic force microscopy. J. Crystal Growth, 2002, 235(1~4):411~414
[12] [12] Cheng Y H, Tay B K, Lau S P et al.. Influence of substrate bias on the structure and mechanical properties of ta-C: W films deposited by filtered cathodic vacuum arc. Surface and Coatings Technol., 2001, 146~147:398~404
[13] [13] Zhang R, Bhat I. Atomic force microscopy studies of CdTe films grown by epitaxial lateral overgrowth. J. Electronic Materials, 2001, 30(11):1370~1375
[14] [14] Li Jianming, Lu Li, Su Ying et al.. Fractal-based description for the three-dimensional surface of materials. J. Appl. Phys., 1999, 86(5):2526~2532
[15] [15] Chan C T, Wang G C. Roughness evolution of Si(111) by low-energy ion bombardment. Surface Sci., 1998, 414(1~2):17~25
[16] [16] Freudenstein R, Klett A, Kulisch W. Investigation of the nucleation of c-BN by AFM measurements. Thin Solid Films, 2001, 398~399:217~221
[17] [17] Saitou M, Chinen T, Odo Y. Schwoebel effect and dynamic scaling behavior in nickel film growth by electrodeposition. Surface and Coatings Technol., 1999, 115(2):282~284
[18] [18] Drotar J T, Zhao Y P, Lu T M et al.. Numerical analysis of the noisy Kuramoto-Sivashinsky equation in 2+1 dimensions. Phys. Rev. (E), 1999, 59(1):177~185
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Morphology Analysis of Titanic Thin Film Prepared by Ion Beam Sputtering[J]. Acta Optica Sinica, 2003, 23(4): 480