Surface Defect Detection of Optical Components Based on Sparse Matrix

Chen Chen; Hongjun Wang; Dasen Wang; Ailing Tian; Bingcai Liu; Xueliang Zhu; Weiguo Liu

doi:10.3788/CJL201946.0404007

Chinese Journal of Lasers, Volume. 46, Issue 4, 0404007(2019)

Surface Defect Detection of Optical Components Based on Sparse Matrix

Chen Chen^1、*, Hongjun Wang^1、*, Dasen Wang², Ailing Tian¹, Bingcai Liu¹, Xueliang Zhu¹, and Weiguo Liu¹

¹ Shaanxi Province Key Laboratory of Membrane Technology and Optical Test, School of Optoelectronic Engineering, Xi'an Technological University, Xi'an, Shaanxi 710021, China

² The Ningbo Branch of Ordnance Science Institute of China, Ningbo, Zhejiang 310022, China

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Figures & Tables(15)

Fig. 1. Schematic of scattered light caused by surface defects

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Fig. 2. Principle diagram of microscopic scattering dark field imaging

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Fig. 3. Microscopic scattering dark field imaging system for surface defects

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Fig. 4. Scanning acquisition path of sub-aperture images

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Fig. 5. Sub-aperture defect images

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Fig. 6. Images after filtering. (a) Original image; (b) mean filtering; (c) median filtering; (d) Wiener filtering; (e) Gaussian filtering

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Fig. 7. Preprocessed images. (a) Binary image; (b) morphologically processed image

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Fig. 8. Mosaic images. (a) Translation mosaic image; (b) sparse matrix mosaic image

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Fig. 9. Defect recognition image

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Fig. 10. Sub-aperture defect images of optical element. (a) Image No. 1; (b) image No. 2

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Fig. 11. Sub-aperture images of processed optical elements. (a) Image No. 1; (b) image No. 2

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Fig. 12. Mosaic image and defect recognition images. (a) Sparse matrix mosaic image; (b) defect recognition image

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Table 1. Statistical table of defect results

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Table 1. Statistical table of defect results

Defectserialnumber	Length /mm	Width /mm	Area /mm²	Defecttype
1	0.0455	0.0414	0.0019	Pockmark
2	13.7059	0.0626	0.8580	Scratch
3	14.3088	0.0494	0.7069	Scratch
4	0.1089	0.0967	0.0105	Pockmark
5	14.8946	0.0412	0.6137	Scratch
6	0.1773	0.0397	0.0070	Scratch
7	15.2110	0.0297	0.4518	Scratch
8	0.0630	0.0513	0.0032	Pockmark
9	15.1866	0.0211	0.3204	Scratch
10	0.0233	0.0233	0.0005	Pockmark
11	0.1067	0.0759	0.0081	Pockmark
12	4.9350	0.0095	0.0469	Scratch

Table 2. Scratch width errors

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Table 2. Scratch width errors

Serialnumber	Measuredvalue /mm	Standardvalue /mm	Error /mm	Relativeerror /%
2	0.0626	0.06	0.0026	4.34
4	0.0494	0.05	-0.0006	-1.20
6	0.0412	0.04	0.0012	3.00
9	0.0297	0.03	-0.0003	-1.00
11	0.0211	0.02	0.0011	5.50
14	0.0095	0.01	-0.0005	-5.00

Table 3. Statistical table of test results of optical elements
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Table 3. Statistical table of test results of optical elements
Defectserialnumber Length /mm Width /mm Area /mm² Defecttype
1 1.3675 0.0235 0.0322 Scratch
2 0.3092 0.0218 0.0067 Scratch
3 0.4667 0.0263 0.0122 Scratch

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Chen Chen, Hongjun Wang, Dasen Wang, Ailing Tian, Bingcai Liu, Xueliang Zhu, Weiguo Liu. Surface Defect Detection of Optical Components Based on Sparse Matrix[J]. Chinese Journal of Lasers, 2019, 46(4): 0404007

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