Journal of Synthetic Crystals, Volume. 52, Issue 11, 1952(2023)
Optimization Design of Key Structure of Polycrystalline Silicon Reduction Furnace Based on Fluent
[3] [3] DEL COSO G, DEL CAIZO C, LUQUE A. Radiative energy loss in a polysilicon CVD reactor[J]. Solar Energy Materials and Solar Cells, 2011, 95(4): 1042-1049.
[4] [4] DEL COSO G, TOBAS I, CAIZO C, et al. Temperature homogeneity of polysilicon rods in a Siemens reactor[J]. Journal of Crystal Growth, 2007, 299(1): 165-170.
[5] [5] AN L S, LEI X S, QI X, et al. Heat and mass transfer characteristics of three-dimensional bell-shaped polysilicon chemical vapor deposition reactor[J]. Journal of Thermal Analysis and Calorimetry, 2020, 141(1): 323-335.
Get Citation
Copy Citation Text
SUN Zegang, GE Zihao, SHI Rongqiu, FEI Tianwen. Optimization Design of Key Structure of Polycrystalline Silicon Reduction Furnace Based on Fluent[J]. Journal of Synthetic Crystals, 2023, 52(11): 1952
Category:
Received: May. 28, 2023
Accepted: --
Published Online: Dec. 5, 2023
The Author Email: SUN Zegang (szg527@126.com)
CSTR:32186.14.