Journal of Synthetic Crystals, Volume. 52, Issue 11, 1952(2023)

Optimization Design of Key Structure of Polycrystalline Silicon Reduction Furnace Based on Fluent

SUN Zegang1、*, GE Zihao1, SHI Rongqiu1, and FEI Tianwen2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(3)

    [3] [3] DEL COSO G, DEL CAIZO C, LUQUE A. Radiative energy loss in a polysilicon CVD reactor[J]. Solar Energy Materials and Solar Cells, 2011, 95(4): 1042-1049.

    [4] [4] DEL COSO G, TOBAS I, CAIZO C, et al. Temperature homogeneity of polysilicon rods in a Siemens reactor[J]. Journal of Crystal Growth, 2007, 299(1): 165-170.

    [5] [5] AN L S, LEI X S, QI X, et al. Heat and mass transfer characteristics of three-dimensional bell-shaped polysilicon chemical vapor deposition reactor[J]. Journal of Thermal Analysis and Calorimetry, 2020, 141(1): 323-335.

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    SUN Zegang, GE Zihao, SHI Rongqiu, FEI Tianwen. Optimization Design of Key Structure of Polycrystalline Silicon Reduction Furnace Based on Fluent[J]. Journal of Synthetic Crystals, 2023, 52(11): 1952

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    Paper Information

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    Received: May. 28, 2023

    Accepted: --

    Published Online: Dec. 5, 2023

    The Author Email: SUN Zegang (szg527@126.com)

    DOI:

    CSTR:32186.14.

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