Journal of Applied Optics, Volume. 44, Issue 6, 1185(2023)

Review of preparation methods of laser films with high damage threshold

Shihao YUAN*, Junqi XU, Junhong SU, Jiaxi LU, and Sen REN
Author Affiliations
  • Shaanxi Province Thin Films Technology and Optical Test Open Key Laboratory, Xi'an Technological University, Xi'an 710021, China
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    Figures & Tables(9)
    Comparison of membrane damage thresholds between two groups[2]
    Damage thresholds with or without protective layer of 248 nm Sc2O3/MgF2 high reflective film
    Laser damage thresholds for TiO2 films prepared at different deposition rates[18]
    Laser damage thresholds of samples[24]
    Damage thresholds of film before and after ion treatment[31]
    Weak absorption values of thin film of different wavelengths of light before and after laser irradiation[36]
    Crack density at different temperatures[44]
    • Table 1. Test results of multi-spot damage threshold before and after pretreatment[37]

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      Table 1. Test results of multi-spot damage threshold before and after pretreatment[37]

      LIDT/(J·cm−2Spot diameters/μm
      300245202
      Before laser-conditioning21.224.840.0
      After laser-conditioning with 0.2 Id30.833.459.6
      After laser-conditioning with 0.4 Id26.032.354.8
      After laser-conditioning with 0.6 Id24.932.867.6
    • Table 2. Grain size and damage threshold at different annealing temperatures[42]

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      Table 2. Grain size and damage threshold at different annealing temperatures[42]

      Annealing temperature/℃Grain size/nmLIDT/(J·cm−2
      As-deposited17±244.1±3.8
      30018±160.7±6.4
      40024±176.6±3.2
      50032±357.5±3.2
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    Shihao YUAN, Junqi XU, Junhong SU, Jiaxi LU, Sen REN. Review of preparation methods of laser films with high damage threshold[J]. Journal of Applied Optics, 2023, 44(6): 1185

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    Paper Information

    Category: Research Articles

    Received: Oct. 10, 2022

    Accepted: --

    Published Online: Mar. 12, 2024

    The Author Email: Shihao YUAN (1819150014@qq.com)

    DOI:10.5768/JAO202344.0610004

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