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Spectroscopy and Spectral Analysis, Volume. 38, Issue 4, 1007(2018)

Spectroscopic Diagnostics on Discharge Characteristics of RF Capacitive Coupled Plasma

LIU Chong1, HE Xiang1, ZHANG Ya-chun2, CHEN Jian-ping3, CHEN Yu-dong3, ZENG Xiao-jun3, CHEN Bing-yan1, and ZHU Wei-hua1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    LIU Chong, HE Xiang, ZHANG Ya-chun, CHEN Jian-ping, CHEN Yu-dong, ZENG Xiao-jun, CHEN Bing-yan, ZHU Wei-hua. Spectroscopic Diagnostics on Discharge Characteristics of RF Capacitive Coupled Plasma[J]. Spectroscopy and Spectral Analysis, 2018, 38(4): 1007

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    Paper Information

    Received: Dec. 6, 2016

    Accepted: --

    Published Online: Jun. 12, 2018

    The Author Email:

    DOI:10.3964/j.issn.1000-0593(2018)04-1007-07

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology