Fig. 1. Schematic diagram of catadioptric projection lens

Fig. 2. Schematic diagram of relationship between object and image

Fig. 3. Structure diagram of catadioptric projection lens

Fig. 4. MTF curves diagram

Fig. 5. Spot diagrams

Fig. 6. Relative illumination diagram

Fig. 7. Vertical axis chromatic aberration curves

Fig. 8. TV distortion diagram

Fig. 9. Image plane grid diagram

Fig. 10. Tolerance analysis results diagram