Chinese Journal of Lasers, Volume. 43, Issue 3, 308002(2016)

Development of Device for High-Precision Deep Ultraviolet Optical Transmittance Measurement

Chen Ming1,2、*, Xie Chengke1, Yang Baoxi1, and Huang Huijie1
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    Chen Ming, Xie Chengke, Yang Baoxi, Huang Huijie. Development of Device for High-Precision Deep Ultraviolet Optical Transmittance Measurement[J]. Chinese Journal of Lasers, 2016, 43(3): 308002

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    Paper Information

    Category: measurement and metrology

    Received: Aug. 17, 2015

    Accepted: --

    Published Online: Mar. 4, 2016

    The Author Email: Ming Chen (chenming@siom.ac.cn)

    DOI:10.3788/cjl201643.0308002

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