Chinese Journal of Lasers, Volume. 36, Issue 3, 746(2009)

Alignment and Micro-Displace Measurement with Four-Quadrant Photo-Detector by System Modeling

Tang Xiaojun1、*, Li Yujun1,2, Liu Junhua1, and Liang Kun3
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    Tang Xiaojun, Li Yujun, Liu Junhua, Liang Kun. Alignment and Micro-Displace Measurement with Four-Quadrant Photo-Detector by System Modeling[J]. Chinese Journal of Lasers, 2009, 36(3): 746

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    Paper Information

    Category: measurement and metrology

    Received: Feb. 21, 2008

    Accepted: --

    Published Online: Mar. 17, 2009

    The Author Email: Xiaojun Tang (xiaojuntang@mail.xjtu.edu.cn)

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