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Chinese Journal of Lasers, Volume. 38, Issue 10, 1002004(2011)

Characterization of CaF2 Substrates for ArF Excimer Laser

Deng Wenyuan*, Jin Chunshui, and Jin Jingcheng
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    Deng Wenyuan, Jin Chunshui, Jin Jingcheng. Characterization of CaF2 Substrates for ArF Excimer Laser[J]. Chinese Journal of Lasers, 2011, 38(10): 1002004

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    Paper Information

    Category: Laser physics

    Received: May. 5, 2011

    Accepted: --

    Published Online: Sep. 16, 2011

    The Author Email: Wenyuan Deng (dwy101@yahoo.com.cn)

    DOI:10.3788/cjl201138.1002004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology