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Chinese Journal of Lasers, Volume. 42, Issue 3, 308008(2015)

Study on Ronchi Shearing Interferometry for Wave-Front Aberration Measurement of Lithography Projection Lens

Wu Feibin1,2、*, Tang Feng1, Wang Xiangzhao1, Li Jie1,2, and Li Sikun1
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    Wu Feibin, Tang Feng, Wang Xiangzhao, Li Jie, Li Sikun. Study on Ronchi Shearing Interferometry for Wave-Front Aberration Measurement of Lithography Projection Lens[J]. Chinese Journal of Lasers, 2015, 42(3): 308008

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    Paper Information

    Category: measurement and metrology

    Received: Oct. 15, 2014

    Accepted: --

    Published Online: Feb. 3, 2015

    The Author Email: Feibin Wu (feibinwu@163.com)

    DOI:10.3788/cjl201542.0308008

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology