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Acta Optica Sinica, Volume. 23, Issue 10, 1241(2003)

Principle and Accuracy of the Stitching Interferometer

[in Chinese]1、*, [in Chinese]2, [in Chinese]2, [in Chinese]2, and [in Chinese]1
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    [3] [3] Bray M. Stitching interferometer for large plano optics using a standard interferometer. Proc. SPIE, 1997, 3134:39～50

    [4] [4] Bray M. Stitching interferometer for large optics: Recent development of a system. Proc. SPIE, 1999, 3492:946～956

    [7] [7] Otsubo M, Okada K, Tsujiuchi J. Measurement of large plane surface shapes by connecting small aperture interferograms. Opt. Engng., 1994, 33(2):608～613

    CLP Journals

    [1] Wang Yuezhu, Tian Yi, Li Hongyu, Ju Youlun. Modeling and Experiment of Testing Asphere by Annular Subaperture Stitching Interferometer[J]. Acta Optica Sinica, 2009, 29(11): 3082

    [2] Xu Xinhua, Wang Qing, Song Bo, Fu Ying. Measurement System of Optical Homogeneity of Large-Size Optical Material Based on Subaperture Stitching Technique[J]. Acta Optica Sinica, 2012, 32(4): 412002

    [3] QIAO Yu-jing, L Ning. Precision estimation of aspheric surface by stitching interferometry based on correcting aberration[J]. Optics and Precision Engineering, 2009, 17(3): 519

    [4] Lei Baiping, Wu Fan, Zhou Chenbo. Application of Ronchi Grating to the Quantitative Measurement of Large-aperture Aspheric Surfaces[J]. Acta Optica Sinica, 2009, 29(9): 2441

    [5] Zhou You, Wang Qing, Liu Shijie. A Method to Modify Systematic Errors in the Stitching[J]. Laser & Optoelectronics Progress, 2014, 51(5): 51202

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Principle and Accuracy of the Stitching Interferometer[J]. Acta Optica Sinica, 2003, 23(10): 1241

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    Paper Information

    Category: Physical Optics

    Received: Jul. 22, 2002

    Accepted: --

    Published Online: Jun. 27, 2006

    The Author Email: (zhang_rz@21cn.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology