Acta Optica Sinica, Volume. 44, Issue 19, 1923001(2024)

Fabrication and Test of Metasurface Silicon Polarization Beam Splitters

Shijie Zhu1, Lu Wang2,3, Hao Shi2,3, Jun Zhao4, Yanqing Wu1,4、*, Lei Zhang5, Zhenjiang Li2,3, Jiali Long4, Shumin Yang4, and Renzhong Tai4
Author Affiliations
  • 1College of Microelectronics, Shanghai University, Shanghai 200444, China
  • 2Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
  • 4Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
  • 5Zhejiang Lab , Hangzhou 311100, Zhejiang , China
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    References(23)

    [3] Zhou Z P, Yang F H, Chen R X et al. Silicon photonics: a converging point of microelectronics and optoelectronics[J]. Micro/Nano Electronics and Intelligent Manufacturing, 1, 4-15(2019).

    [8] Yu C Y, Fan X Y, Fang W J et al. Design of polarization beam splitter based on Al0.9Ga0.1As/Al2O3 subwavelength grating[J]. Laser & Optoelectronics Progress, 59, 1305001(2022).

    [11] Lin Z X, Chen K X, Huang Q S et al. Ultra-broadband polarization beam splitter based on cascaded Mach‒Zehnder interferometers assisted by effectively anisotropic structures[J]. IEEE Photonics Journal, 13, 4500209(2021).

    [13] Wu S B, Zhao Z C, Feng T et al. Compact cross-slot waveguide polarization beam splitter using a sandwich-type coupler[J]. Applied Optics, 59, 1447-1453(2020).

    [18] Dai S J, Xiao J B. Compact and broadband silicon-based polarization beam splitter using asymmetric directional couplers embedded with subwavelength gratings and slots[J]. Applied Optics, 61, 126-134(2022).

    [22] Wei H M, Callewaert F, Hadibrata W et al. Two-photon direct laser writing of inverse-designed free-form near-infrared polarization beamsplitter[J]. Advanced Optical Materials, 7, 1900513(2019).

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    Shijie Zhu, Lu Wang, Hao Shi, Jun Zhao, Yanqing Wu, Lei Zhang, Zhenjiang Li, Jiali Long, Shumin Yang, Renzhong Tai. Fabrication and Test of Metasurface Silicon Polarization Beam Splitters[J]. Acta Optica Sinica, 2024, 44(19): 1923001

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    Paper Information

    Category: Optical Devices

    Received: Apr. 21, 2024

    Accepted: May. 8, 2024

    Published Online: Oct. 12, 2024

    The Author Email: Wu Yanqing (wuyanqing@sari.ac.cn)

    DOI:10.3788/AOS240878

    CSTR:32393.14.AOS240878

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