Acta Optica Sinica, Volume. 3, Issue 5, 436(1983)
A laser interferometer for sample stage positioning
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CHEN GUOXUN. A laser interferometer for sample stage positioning[J]. Acta Optica Sinica, 1983, 3(5): 436
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Mar. 11, 1982
Accepted: --
Published Online: Sep. 15, 2011
The Author Email:
CSTR:32186.14.
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