Journal of Synthetic Crystals, Volume. 50, Issue 4, 752(2021)
Dislocation Distribution in SiC Wafers Studied by Lattice Distortion Detector
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YIN Pengtao, YU Jinying, YANG Xianglong, CHEN Xiufang, XIE Xuejian, PENG Yan, XIAO Longfei, HU Xiaobo, XU Xiangang. Dislocation Distribution in SiC Wafers Studied by Lattice Distortion Detector[J]. Journal of Synthetic Crystals, 2021, 50(4): 752
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Received: Jan. 28, 2021
Accepted: --
Published Online: Jul. 13, 2021
The Author Email: Pengtao YIN (yinpengtao@mail.sdu.edu.cn)
CSTR:32186.14.
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