Sub-10 nm fabrication: methods and applications

Yiqin Chen; Zhiwen Shu; Shi Zhang; Pei Zeng; Huikang Liang; Mengjie Zheng; Huigao Duan

doi:10.1088/2631-7990/ac087c

International Journal of Extreme Manufacturing, Volume. 3, Issue 3, 32002(2021)

Sub-10 nm fabrication: methods and applications

Yiqin Chen¹, Zhiwen Shu¹, Shi Zhang¹, Pei Zeng¹, Huikang Liang¹, Mengjie Zheng², and Huigao Duan^1、*

¹National Engineering Research Center for High Efficiency Grinding, State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, People’s Republic of China

²Advanced Design & Manufacturing Group for Micro/Nanophotonics, Jihua Laboratory, Foshan 528000, People’s Republic of China

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Yiqin Chen, Zhiwen Shu, Shi Zhang, Pei Zeng, Huikang Liang, Mengjie Zheng, Huigao Duan. Sub-10 nm fabrication: methods and applications[J]. International Journal of Extreme Manufacturing, 2021, 3(3): 32002

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Paper Information

Category: Topical Review

Received: Feb. 21, 2021

Accepted: --

Published Online: Jan. 10, 2022

The Author Email: Huigao Duan (duanhg@hnu.edu.cn)

DOI:10.1088/2631-7990/ac087c

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology