Fig. 1. Schematic of phase modulation optical phased array (OPA)

Fig. 2. Schematic of grating coupler for beam scanning

Fig. 3. Schematic of OPA integrated with on-chip laser

Fig. 4. (a) Schematic of large-scale nanophotonic phased array, the inset is close-up view of one antenna unit; (b) scanning electron microscope (SEM) of part of whole structure; (c) close-up SEM of one antenna unit

Fig. 5. Over arrangement of fully integrated beam scanner

Fig. 6. Schematic of hybrid-integrated OPA

Fig. 7. (a) Schematic of solid-state FMCW lidar system; (b) lidar chiplet on top of one dime; (c) optical micrograph of device

Fig. 8. (a) Schematic of simplified structure of device; (b) optical microscope image of star coupler;(c) tilted SEM image of emitter with removed cladding, the inset is schematic of emitter at a different angle

Fig. 9. Typical directional antenna radiation pattern in polar coordinate

Fig. 10. (a) Schematic of silicon nanophotonic coherent imager (NCI); (b) micro-photograph of NIC implemented by standard IME silicon-on-insulator process