Acta Optica Sinica, Volume. 39, Issue 3, 0322002(2019)
Off-Axis Three-Mirror Anastigmatic System Alignment and Application Based on Principal Component Analysis
Figures & Tables(10)
Table 1. Sensitivity matrix A
View tableTable 1. Sensitivity matrix A
Zernike polynomial Dx 2Dy 2Tx 2Ty 2Dx 3Dy 3Tx 3Ty 3D 2D fD 3Z 500.31486 0.46487 1.80531 -0.60036 0.74743 0.95358 -4.82906 3.94319 -0.54295 0.25935 -0.31383 Z 60-0.52872 -0.34597 -0.24714 1.77598 -1.02581 0.37120 -3.27161 -4.73697 -1.07602 0.67464 -0.70732 Z 70-0.06317 -0.03223 -0.05213 0.21715 -0.01349 -0.01396 0.01612 0.03531 -0.05357 0.03416 -0.03388 Z 80-0.00977 0.01583 0.02058 0.03139 -0.00523 0.00794 -0.05523 -0.00700 0.04632 -0.00755 0.00681 Z 900.00049 0.00659 0.02540 0.00026 -0.00011 0.00351 -0.00614 -0.00066 -0.00284 -0.00028 0.00011 Z 510 -0.34399 -0.03201 0 0 0.86515 -6.31798 0 -1.79175 1.13489 -1.20276 Z 61-0.67445 0 0 1.99736 -1.60045 0 0 -7.94097 0 0 0 Z 71-0.05868 0 0 0.20938 -0.01260 0 0 0.03345 0 0 0 Z 810 0.02309 -0.03427 0 0 0.01195 -0.06807 0 0.08036 -0.03505 0.03458 Z 910 -0.00044 -0.00728 0 0 0.00001 -0.00515 0 0.00356 -0.00023 0.00023 Z 52-0.31022 -0.79446 -2.03727 0.85579 -0.63397 0.72350 -6.01166 -3.44206 -1.98652 1.25104 -1.31498 Z 62-0.29098 0.65879 2.07534 0.50309 -1.59013 0.08424 1.11993 -8.18076 1.17988 -0.72176 0.73270 Z 72-0.03368 0.01991 0.03604 0.15435 -0.00670 0.00703 -0.00786 0.04266 0.02071 -0.01622 0.01609 Z 820.01047 0.03470 0.04195 -0.02962 0.00300 0.02013 -0.06012 0.00311 0.04869 -0.03631 0.03561 Z 92-0.00052 0.00216 0.01044 0.00283 -0.00025 0.00161 -0.00217 -0.00041 -0.00505 0.00053 -0.00062
Table 2. Characteristic value, contribution rate, and cumulative contribution rate corresponding to principal component with cumulative contribution rate greater than 95%
View tableTable 2. Characteristic value, contribution rate, and cumulative contribution rate corresponding to principal component with cumulative contribution rate greater than 95%
Principal component Characteristic value Contribution rate Cumulative contribution rate F 15.47037154901298 0.364691436600865 0.364691436600865 F 23.84204230941265 0.256136153960843 0.620827590561709 F 33.01726718697149 0.201151145798100 0.821978736359808 F 41.97697745862482 0.131798497241654 0.953777233601463
Table 3. Adjustment sorting and corresponding score
View tableTable 3. Adjustment sorting and corresponding score
Adjustment sorting Tx 3Ty 3Tx 2Ty 2D 2Dx 3Dx 2Dy 3D fD 3Dy 2Corresponding score 8.9529 8.6439 8.5334 8.1599 4.2834 3.6721 3.3978 3.2574 3.1500 3.1127 2.3299
Table 4. Given misalignment
View tableTable 4. Given misalignment
Mirror D Dx Dy Tx Ty Second mirror 0.0500 0.0200 -0.0500 0.0700 0.0900 FM 0.0300 Third mirror -0.0400 0.0600 0.0800 -0.0600 0.1000
Table 5. Calculated misalignment based on inverse optimization method
View tableTable 5. Calculated misalignment based on inverse optimization method
Mirror D Dx Dy Tx Ty Second mirror 0.0500 0.0200 -0.0500 0.0700 0.0900 FM 0.0300 Third mirror -0.0400 0.0600 0.0800 -0.0600 0.1000
Table 6. Difference between given misalignment and calculated misalignment
View tableTable 6. Difference between given misalignment and calculated misalignment
Mirror D Dx Dy Tx Ty Second mirror 0.0046 -0.0111 -0.0211 0.0050 -0.0002 FM -0.2000 Third mirror -0.2000 0.0341 -0.0041 0.0140 -0.0060
Table 7. Calculation results of different alignment schemes
View tableTable 7. Calculation results of different alignment schemes
Data number Misalignment /mm Dx 2Dy 2Tx 2Ty 2Dx 3Dy 3Tx 31 Set value -0.0500 0.0700 0.0900 0.0800 -0.0600 Solution 1 0.0622 -0.0742 0.0900 Solution 2 -0.0452 0.0900 0.5000 Solution 3 -0.0497 0.0726 0.0700 -0.0628 2 Set value 0.0200 -0.0500 0.0700 0.0900 0.0600 0.0800 -0.0600 Solution 1 0.0201 0.0596 0.0900 0.0609 -0.0517 -0.0870 Solution 2 0.0613 0.0834 0.0470 -0.0761 Solution 3 0.0669 0.0807 -0.0718 Data number Misalignment /mm Ty 3D 2D fD 3Wave-front of three fields of view 1 Set value 0.1000 0.0965,0.0704,0.0484 Solution 1 0.1000 0.0990,0.0762,0.0489 Solution 2 0.1000 0.1451,0.0574,0.0870 Solution 3 0.2321,0.2606,0.3305 2 Set value 0.1000 0.0500 0.03 -0.04 0.0965,0.0704,0.0484 Solution 1 0.0998 0.0276 0.0983,0.0589,0.0491 Solution 2 0.1027 0.0178 0.1003,0.0518,0.0555 Solution 3 0.1115 0.3767,0.5009,0.4932
Tools
Get Citation
Copy Citation Text
Jikai Guo, Zhile Wang, Min Lu. Off-Axis Three-Mirror Anastigmatic System Alignment and Application Based on Principal Component Analysis[J]. Acta Optica Sinica, 2019, 39(3): 0322002
Paper Information
Category: Optical Design and Fabrication
Received: Aug. 16, 2018
Accepted: Nov. 19, 2018
Published Online: May. 10, 2019
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20