Fig. 1. Schematic diagram of OPA beam transmission^[7]

Fig. 2. Fraunhofer multi-slit diffraction model

Fig. 3. Phase shift arrays based on LiTaO₃ crystal^[8]

Fig. 4. OPA based on GaAs/AlGaAs materials^[10]

Fig. 5. Schematic diagram of OPA based on GaAs/AlGaAs materials and experimental setup schematic diagram^[12]. (a) Schematic diagram of OPA; (b) experimental setup schematic diagram

Fig. 6. Display device diagram for only 5 channels^[18]

Fig. 7. OPA schematic diagram, optical microscope image of silicon waveguide, and packaging device diagram^[20]. (a) Schematic diagram of OPA; (b) optical microscopic image of silicon waveguide; (c) package device diagram

Fig. 8. Optical microstructure diagram of proposed SiN-Si dual-layer OPA^[21]

Fig. 9. Layout of a uniformly spaced OPA and Far-field pattern^[22]

Fig. 10. One-dimensional OPA chip schematic^[16]

Fig. 11. Schematic diagram of LCOPA structure and relationship curve between phase delay and applied RMS voltage. (a) Schematic diagram of LCOPA structure; (b) phase delay and applied RMS voltage relationship curve

Fig. 12. Four-channel device concept diagram and zone-select structure diagram^[31]. (a) Illustration of four-channel device concept; (b) zone-select structure diagram

Fig. 13. MEMS OPA structure diagram^[37]

Fig. 14. Schematic diagram of the structure of a single thermo-optical phase shifter in optical waveguide phased array, LCOPA phase shifter, and MEMS phase shifter SEM diagram. (a) Schematic diagram of thermal optical phase shifter structure; (b) LCOPA phase shifter^［39］; (c) MEMS phase shifter SEM diagram^［37］

Fig. 15. LCOPA beam control model

Fig. 16. Far field radiant intensity before and after phase compensation^［40］. (a) Before phase compensation; (b) after phase compensation