Subsurface Defect Detection Method of Optical Elements Based on Through-Focus Scanning Optical Microscopy

Na Wang; Lituo Liu; Xiaojiao Song; Dezhao Wang; Shengyang Wang; Guannan Li; Weihu Zhou

doi:10.3788/AOS230677

Acta Optica Sinica, Volume. 43, Issue 21, 2112001(2023)

Subsurface Defect Detection Method of Optical Elements Based on Through-Focus Scanning Optical Microscopy

Na Wang^1,2, Lituo Liu^2、*, Xiaojiao Song², Dezhao Wang^2,3, Shengyang Wang^2,4, Guannan Li², and Weihu Zhou^1,2,3,4、**

¹School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, Anhui , China

²Optoelectronic Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

³School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin , China

⁴School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China

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Na Wang, Lituo Liu, Xiaojiao Song, Dezhao Wang, Shengyang Wang, Guannan Li, Weihu Zhou. Subsurface Defect Detection Method of Optical Elements Based on Through-Focus Scanning Optical Microscopy[J]. Acta Optica Sinica, 2023, 43(21): 2112001

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Mar. 14, 2023

Accepted: May. 31, 2023

Published Online: Nov. 8, 2023

The Author Email: Liu Lituo (liulituo@ime.ac.cn), Zhou Weihu (zhouweihu@ime.ac.cn)

DOI:10.3788/AOS230677

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Instrumentation, Measurement and Metrology