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Chinese Journal of Lasers, Volume. 41, Issue 12, 1208001(2014)

Angular Measurement Using Moire Interferometry for Alignment of Proximity Lithography

Tong Junmin1,2、*, Zhou Shaolin2, Zhao Lixin2, and Hu Song2
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    Tong Junmin, Zhou Shaolin, Zhao Lixin, Hu Song. Angular Measurement Using Moire Interferometry for Alignment of Proximity Lithography[J]. Chinese Journal of Lasers, 2014, 41(12): 1208001

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    Paper Information

    Category: measurement and metrology

    Received: Jun. 6, 2014

    Accepted: --

    Published Online: Oct. 30, 2014

    The Author Email: Junmin Tong (tjmtx@126.com)

    DOI:10.3788/cjl201441.1208001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology