Journal of Semiconductors, Volume. 44, Issue 12, 124101(2023)

Multiple SiGe/Si layers epitaxy and SiGe selective etching for vertically stacked DRAM

Zhenzhen Kong1,4, Hongxiao Lin3,4, Hailing Wang2, Yanpeng Song2, Junjie Li1, Xiaomeng Liu2, Anyan Du1, Yuanhao Miao1,3, Yiwen Zhang1,4, Yuhui Ren1,4, Chen Li1,4, Jiahan Yu1,4, Jinbiao Liu1,4, Jingxiong Liu1,4, Qinzhu Zhang1, Jianfeng Gao1, Huihui Li2, Xiangsheng Wang2, Junfeng Li1, Henry H. Radamson3, Chao Zhao2, Tianchun Ye1,4, and Guilei Wang2,5、*
Author Affiliations
  • 1Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2Beijing Superstring Academy of Memory Technology, Beijing 100176, China
  • 3Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China
  • 4Microelectronics Institute, University of Chinese Academy of Sciences, Beijing 100049, China
  • 5Hefei National Laboratory, Hefei 230088, China
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    References(48)

    [2] H H Radamson, E Simeon. CMOS past, present and future. Amsterdam: Elsevier, 105(2018).

    [19] Y C Liu, C T Tu, C E Tsai et al. First highly stacked Ge0.95Si0.05 nGAAFETs with record ION = 110 μA (4100 μA/μm) at VOV=VDS=0.5V and high Gm, max = 340 μS (13000 μS/μm) at VDS=0.5V by wet etching, 1(2021).

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    Zhenzhen Kong, Hongxiao Lin, Hailing Wang, Yanpeng Song, Junjie Li, Xiaomeng Liu, Anyan Du, Yuanhao Miao, Yiwen Zhang, Yuhui Ren, Chen Li, Jiahan Yu, Jinbiao Liu, Jingxiong Liu, Qinzhu Zhang, Jianfeng Gao, Huihui Li, Xiangsheng Wang, Junfeng Li, Henry H. Radamson, Chao Zhao, Tianchun Ye, Guilei Wang. Multiple SiGe/Si layers epitaxy and SiGe selective etching for vertically stacked DRAM[J]. Journal of Semiconductors, 2023, 44(12): 124101

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    Paper Information

    Category: Articles

    Received: Jul. 7, 2023

    Accepted: --

    Published Online: Mar. 13, 2024

    The Author Email: Wang Guilei (GLWang)

    DOI:10.1088/1674-4926/44/12/124101

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