Laser & Optoelectronics Progress, Volume. 61, Issue 5, 0522004(2024)

Focusing Analysis of Linear Zone Plate with Equal-Width Single-Mode Slits Waveguide Working in Extreme Ultraviolet

Wenxuan Chen, Qing Cao*, Changjie Cheng, Chaoyue Li, Jirui Zhu, and Yaxing Mao
Author Affiliations
  • Department of Physics, College of Sciences, Shanghai University, Shanghai 200444, China
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    Figures & Tables(9)
    Schematic of linear zone plate. (a) Traditional linear zone plate (TLZP); (b) equal-width single-mode slit waveguide linear zone plate (ESSWLZP)
    Schematic diagram of equal-width single-mode slit waveguide linear zone plate
    Schematic of slit waveguide structure
    Theoretical and simulated fundamental mode normalized light field distribution in x direction of a single slit in the equal-width single-mode slit waveguide linear zone plate. (a) λ=5 nm; (b) λ=13.5 nm; (c) λ=40 nm
    Theoretical and simulated normalized far-field light field distribution of a single slit in the equal-width single-mode slit waveguide linear zone plate at the wavelength of 13.5 nm
    Normalized far-field intensity distribution of the equal-width single-mode slit waveguide linear zone plate(ESSWLZP) and traditional linear zone plate(TLZP) at the wavelength of 13.5 nm
    Schematic of multilevel equal-width single-mode slit waveguide linear zone plate, the solid line represents a periodic region, the dashed line represents the boundary of each level.(a) 2-levels structure; (b) 4-levels structure
    • Table 1. Effective refractive index and propagation constant for different slit half widths at the wavelength of 13.5 nm

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      Table 1. Effective refractive index and propagation constant for different slit half widths at the wavelength of 13.5 nm

      Slit half width a /nmWaveguide parameter Re(VEffective refractive index neffPropagation constant β
      7.1161.50.96098-0.0079561j0.44698-0.0038j
      7.2161.5230.96037-0.0081679j0.44726-0.0037j
      7.3161.5420.96157-0.0077513j0.44753-0.0036j
      7.4161.5630.96215-0.0075534j0.44780-0.0035j
    • Table 2. Number of modes and effective refractive index for different slit half widths at the wavelength of 13.5 nm

      View table

      Table 2. Number of modes and effective refractive index for different slit half widths at the wavelength of 13.5 nm

      a /nm7.11614.23221.34828.46435.58
      ReV1.534.567.5
      neffTE00.9609‒0.00796j0.984-0.00187j0.9915-0.00069j0.9948-0.00033j0.9965-0.00018j
      TE10.9373-0.00936j0.9661-0.00314j0.9791-0.00143j0.9858-0.00077j
      TE20.9245-0.00915j0.9529-0.00372j0.968-0.00191j
      TE30.9163-0.00861j0.9429-0.00396j
      TE40.9105-0.00799j
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    Wenxuan Chen, Qing Cao, Changjie Cheng, Chaoyue Li, Jirui Zhu, Yaxing Mao. Focusing Analysis of Linear Zone Plate with Equal-Width Single-Mode Slits Waveguide Working in Extreme Ultraviolet[J]. Laser & Optoelectronics Progress, 2024, 61(5): 0522004

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Apr. 17, 2023

    Accepted: May. 9, 2023

    Published Online: Mar. 13, 2024

    The Author Email: Qing Cao (qcao@shu.edu.cn)

    DOI:10.3788/LOP231093

    CSTR:32186.14.LOP231093

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