Laser & Optoelectronics Progress, Volume. 61, Issue 5, 0522004(2024)
Focusing Analysis of Linear Zone Plate with Equal-Width Single-Mode Slits Waveguide Working in Extreme Ultraviolet
Fig. 1. Schematic of linear zone plate. (a) Traditional linear zone plate (TLZP); (b) equal-width single-mode slit waveguide linear zone plate (ESSWLZP)
Fig. 2. Schematic diagram of equal-width single-mode slit waveguide linear zone plate
Fig. 4. Theoretical and simulated fundamental mode normalized light field distribution in x direction of a single slit in the equal-width single-mode slit waveguide linear zone plate. (a)
Fig. 5. Theoretical and simulated normalized far-field light field distribution of a single slit in the equal-width single-mode slit waveguide linear zone plate at the wavelength of 13.5 nm
Fig. 6. Normalized far-field intensity distribution of the equal-width single-mode slit waveguide linear zone plate(ESSWLZP) and traditional linear zone plate(TLZP) at the wavelength of 13.5 nm
Fig. 7. Schematic of multilevel equal-width single-mode slit waveguide linear zone plate, the solid line represents a periodic region, the dashed line represents the boundary of each level.(a) 2-levels structure; (b) 4-levels structure
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Wenxuan Chen, Qing Cao, Changjie Cheng, Chaoyue Li, Jirui Zhu, Yaxing Mao. Focusing Analysis of Linear Zone Plate with Equal-Width Single-Mode Slits Waveguide Working in Extreme Ultraviolet[J]. Laser & Optoelectronics Progress, 2024, 61(5): 0522004
Category: Optical Design and Fabrication
Received: Apr. 17, 2023
Accepted: May. 9, 2023
Published Online: Mar. 13, 2024
The Author Email: Qing Cao (qcao@shu.edu.cn)
CSTR:32186.14.LOP231093