Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis

Fig. 5. Results of the comparison experiments between the auto-collimator and our device for measuring (a) the tilt motion error around the Y axis and (b) the angular positioning error.

Download full size

View in Article

Table 1. Corresponding Detectors and Expressions for Measuring Each DOF Motion Error of a Rotary Axis

View table

View in Article

Table 1. Corresponding Detectors and Expressions for Measuring Each DOF Motion Error of a Rotary Axis

Motion Error	Detector	Expression
$δ_{x} (θ)$	Interferometer	Omitted
$δ_{y} (θ)$	QD1 or QD2	$Δ Y_{QD 1} / 2$ or $Δ Y_{QD 2} / 2$
$δ_{z} (θ)$	QD1 or QD2	$Δ Z_{QD 1} / 2$ or $Δ Z_{QD 2} / 2$
$ε_{x} (θ)$	QD1 and QD2	$(Δ Z_{QD 1} - Δ Z_{QD 2}) / 2 h$
$ε_{y} (θ)$	PSD2	$Δ Z_{PSD 2} / 2 f_{2}$
$ε_{z} (θ)$	PSD2	$Δ Y_{PSD 2} / 2 f_{2} + θ_{ref} - θ$

Table 2. Measurement Resolution, Standard Deviation of Stability (SDS) and Maximum Repeatability Value (MRV)

View table

View in Article

Table 2. Measurement Resolution, Standard Deviation of Stability (SDS) and Maximum Repeatability Value (MRV)

Errors	Resolution	SDS	MRV
$δ_{x} (θ)$	20 pm	$0.03 μ m$	$3.9 μ m$
$δ_{y} (θ)$	$0.04 μ m$	$0.07 μ m$	$3.0 μ m$
$δ_{z} (θ)$	$0.04 μ m$	$0.04 μ m$	$0.7 μ m$
$ε_{x} (θ)$	0.27 arcsec	0.05 arcsec	2.5 arcsec
$ε_{y} (θ)$	0.26 arcsec	0.17 arcsec	2.4 arcsec
$ε_{z} (θ)$	0.26 arcsec	0.06 arcsec	24.8 arcsec

Tools

Get Citation

Copy Citation Text

Jiakun Li, Qibo Feng, Chuanchen Bao, Bin Zhang, "Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis," Chin. Opt. Lett. 17, 011203 (2019)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Instrumentation, measurement, and metrology

Received: Sep. 14, 2018

Accepted: Nov. 23, 2018

Posted: Dec. 3, 2018

Published Online: Jan. 17, 2019

The Author Email: Qibo Feng (qbfeng@bjtu.edu.cn)

DOI:10.3788/COL201917.011203

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology