Design Method of Phase Grating Mark in Resonance Domain

$First diffraction efficiency under different harmonic numbers in two polarization states. (a) AA5-TE; (b) AA5-TM; (c) AA7-TE; (d) AA7-TM; (e) AA10-TE; (f) AA10-TM$

Fig. 4. First diffraction efficiency under different harmonic numbers in two polarization states. (a) AA5-TE; (b) AA5-TM; (c) AA7-TE; (d) AA7-TM; (e) AA10-TE; (f) AA10-TM

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Fig. 5. Iterative results of sum of signal-to-noise ratios under differential evolution algorithm

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Fig. 6. Sum of signal-to-noise ratios of grating with period of 3.2 μm in three polarization states. (a) TE polarization; (b) TM polarization; (c) circular polarization

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Table 1. Grating material parameters
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Table 1. Grating material parameters
Incident wavelength /nm Real refractive index Extinction coefficient
532 4.1500 0.043947
633 3.8812 0.018932
780 3.7093 0.007481
852 3.6611 0.004707

Table 2. Optimum parameters of grating under three polarization states
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Table 2. Optimum parameters of grating under three polarization states
Polarization R_SN，sum Duty cycle Depth /nm
TE 572.39 0.466 170.0
TM 586.63 0.484 161.5
Circular 576.59 0.474 165.5

Table 3. Sum of signal-to-noise ratios under different grating parameters

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Table 3. Sum of signal-to-noise ratios under different grating parameters

Grating	Duty cycle	Depth /nm	Polarization	R_SN，sum	Increase ratio /%
Grating_532	0.500	133.00	Circular	507.03	15.7
Grating_633	0.500	158.25	Circular	569.00	3.1
Grating_780	0.500	195.00	Circular	528.57	11.0
Grating_852	0.500	213.00	Circular	471.47	24.4
Grating_Opt	0.484	161.50	TM	586.63

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Guangying Zhou, Yuejing Qi, Wei Qi, Zengxiong Lu, Jiani Su. Design Method of Phase Grating Mark in Resonance Domain[J]. Acta Optica Sinica, 2022, 42(21): 2105001

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