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Opto-Electronic Science, Volume. 1, Issue 10, 220011(2022)

Metasurface-based nanoprinting: principle, design and advances

Rao Fu1、†, Kuixian Chen1、†, Zile Li1,2、†, Shaohua Yu2、*, and Guoxing Zheng1,2,3,4、**
Author Affiliations
  • 1School of Electronic Information and School of Microelectronics, Wuhan University, Wuhan 430072, China
  • 2Peng Cheng Laboratory, Shenzhen 518055, China
  • 3Wuhan Institute of Quantum Technology, Wuhan 430206, China
  • 4Hubei Luojia Laboratory, Wuhan 430079, China
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    Rao Fu, Kuixian Chen, Zile Li, Shaohua Yu, Guoxing Zheng. Metasurface-based nanoprinting: principle, design and advances[J]. Opto-Electronic Science, 2022, 1(10): 220011

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    Paper Information

    Category: Research Articles

    Received: Jun. 22, 2022

    Accepted: Aug. 16, 2022

    Published Online: Nov. 18, 2022

    The Author Email:

    DOI:10.29026/oes.2022.220011

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology