Optics and Precision Engineering, Volume. 20, Issue 9, 2006(2012)
Effect of ultrasonic treatment on SU-8 swelling in UV-LIGA technology
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DU Li-qun, LIU Ya-ping, LI Yong-hui, LI Cheng-bin. Effect of ultrasonic treatment on SU-8 swelling in UV-LIGA technology[J]. Optics and Precision Engineering, 2012, 20(9): 2006
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Received: Mar. 20, 2012
Accepted: --
Published Online: Oct. 12, 2012
The Author Email: LIU Ya-ping (yapingliu008@126.com)
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