Researching | Optical testing of dynamic characteristic of vibrating wheel micromechanical gyroscope

Optics and Precision Engineering, Volume. 16, Issue 2, 295(2008)

Optical testing of dynamic characteristic of vibrating wheel micromechanical gyroscope

[in Chinese]^1,2 and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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References(1)

[10] [10] CHOA S H.Reliability of vacuum packaged MEMS gyroscopes[J].Microelectronics Reliability,2005,45:361-369.

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[in Chinese], [in Chinese]. Optical testing of dynamic characteristic of vibrating wheel micromechanical gyroscope[J]. Optics and Precision Engineering, 2008, 16(2): 295

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Paper Information

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Received: Aug. 28, 2007

Accepted: --

Published Online: Jul. 8, 2008

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology