Fig. 1. Unit scanning system working principle. (a) 0° scanning field of view; (b) ω scanning field of view

Fig. 2. Calculation parameters of aberration field displacement vector of single misaligned surface

Fig. 3. Optical path structure of a unit scanning system under multiple scanning field of view. (a) Original structure; (b) structure of multiple scanning field of view

Fig. 4. Flow chart of dynamic wavefront aberrations calculation of unit scanning system

Fig. 5. Curves of primary wavefront aberrations with field of view. (a) Spherical (W₀₄₀); (b) coma (W₁₃₁); (c) astigmatism (W₂₂₂); (d) field curvature (W_220M); (e) distortion (W₃₁₁)

Fig. 6. Curves of wavefront aberrations evaluation factor with field of view. (a) Sum of primary wavefront aberrations (W_all); (b) RMS wavefront error (W_RMS)

Fig. 7. Primary wavefront aberrations at different surfaces of each scanning field of view. (a) 0°; (b) 3°; (c) 5°; (d) 7.07°; (e) 8°