Fig. 1. Schematic of distribution and unit structure of liquid lens array for correcting wavefront aberrations. (a) Hexagonal array distribution; (b) curvature/tilt error compensation unit; (c) piston error compensation unit

Fig. 2. Principle of wavefront aberration correction by liquid lens array unit. (a) Process of wavefront aberration correction; (b) correction of tilt error by the first liquid-liquid interface; (c) correction of curvature error by the second liquid-liquid interface; (d) correction of piston error by the third liquid-liquid interface

Fig. 3. Interface shape of three-liquid zoom lens unit for curvature/tilt error compensation under different operating voltages combination at steady state. (a) U₁=U₂=U₃=U₄=U₅=0 V; (b) U₁=U₂=U₃=U₄=U₅=67.1 V; (c) U₁=U₂=U₃=U₄=67.1 V, U₅=77.1 V; (d) U₁=67.1 V, U₂=58.1 V, U₃=67.1 V, U₄=77.1 V, U₅=67.1 V; (e) top view of electrode

Fig. 4. Spot diagram before and after correction by hexagonal close-packed array of liquid lens. (a) Before correction; (b) after correction

Fig. 5. Wavefront diagram before and after correction by hexagonal close-packed array of liquid lens. (a) Before correction; (b) after correction

Fig. 6. Point spread function before and after correction by hexagonal close-packed array of liquid lens. (a) Before correction; (b) after correction

Fig. 7. Difference of point spread function under different array arrangement. (a) Hexagon, D/d=1.0; (b) hexagon, D/d=1.5; (c) hexagon, D/d=2.0; (d) square, D/d=1.0; (e) square, D/d=1.5; (f) square, D/d=2.0

Fig. 8. Relationship between ratio of radius for 83.8% of spot energy to Airy spot radius R/r and ratio of unit spacing and unit diameter D/d