Chinese Optics Letters, Volume. 3, Issue 2, 0263(2005)
In-situ end-point detection during ion-beam etching of multilayer dielectric gratings
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Hua Lin, Lifeng Li, Lijiang Zeng, "In-situ end-point detection during ion-beam etching of multilayer dielectric gratings," Chin. Opt. Lett. 3, 0263 (2005)
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