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Acta Optica Sinica, Volume. 31, Issue 5, 523005(2011)

Re-Studies on Parallel Confocal Measurement System with Digital Micromirror Device

Yu Qing*, Yu Xiaofen, Liu Wenwen, and Cheng Lingli
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    Article index updated: Mar. 10, 2025

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    Yu Qing, Yu Xiaofen, Liu Wenwen, Cheng Lingli. Re-Studies on Parallel Confocal Measurement System with Digital Micromirror Device[J]. Acta Optica Sinica, 2011, 31(5): 523005

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    Paper Information

    Category: Optical Devices

    Received: Sep. 20, 2010

    Accepted: --

    Published Online: May. 9, 2011

    The Author Email: Qing Yu (jorson.y@163.com)

    DOI:10.3788/aos201131.0523005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology