Infrared and Laser Engineering, Volume. 51, Issue 9, 20220456(2022)
Interferometric testing of convex freeform surface in industrial lens based on Computer-Generated-Hologram (invited)
Figures & Tables(13)
Fig. 1. Layout of convex freeform surface interferometric testing by CGH
Fig. 3. Deviation between freeform and best fitting spheric surface
Fig. 4. Design result of main section. (a) Optical layout; (b) Wavefront aberration
Fig. 8. Separation results of diffraction order. (a) Optical layout; (b) Separation results
Fig. 9. Surface-shape error by tolerances. (a) 1 μm errors in
Fig. 10. Experiment of testing. (a) Optical layout of experiment; (b) CGH
Fig. 11. Testing result of freeform surface. （a） Interferometry； （b） Profile measurement
Table 1. Parameters of freeform surface
View tableView in ArticleTable 1. Parameters of freeform surface
Parameter Value Radius of curvature R/mm k Rex/mm Rey/mm x axis decenter/mm y axis decenter/mm Z4 Z6 Z8 Z10 Z12 −1.04e+002 0 50/2 50/2 0 −5 −2.74e-007 2.62e-011 7.11e-015 −3.45e-016 4.58e-019
Table 2. Position and orientation tolerances of CGH
View tableView in ArticleTable 2. Position and orientation tolerances of CGH
Tolerances Value Decenter x/μm Decenter y/μm Decenter z/μm Tilt x/(") Tilt y/(") Tilt z/(") 5 5 5 5 5 5
Tools
Get Citation
Copy Citation Text
Deyan Zhu, Junwei Tang, Chengli Guo, Yuanzheng Li, Liefeng Zhao. Interferometric testing of convex freeform surface in industrial lens based on Computer-Generated-Hologram (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220456
Paper Information
Category:
Received: Jun. 30, 2022
Accepted: --
Published Online: Jan. 6, 2023
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20