Chinese Journal of Lasers, Volume. 49, Issue 2, 0202001(2022)

Dual-Beam Laser Direct Writing Nano-Lithography System Based on Peripheral Photoinhibition Technology

Guozun Zhou1、†, Minfei He1、†, Zhenyao Yang2, Chun Cao2, Fei Xie3, Yaoyu Cao3, Cuifang Kuang1,2、*, and Xu Liu1,2、**
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China
  • 2Research Center for Smart Sensing, Zhejiang Laboratory, Hangzhou, Zhejiang 310023, China
  • 3Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou, Guangdong 510000, China
  • show less

    Conclusions

    For the high-speed and high-precision fabrication of complex three-dimensional micro-nano structures, a dual-beam laser direct writing lithography system based on the PPI technology is designed and developed. To meet different requirements, the system may operate in different modes at user options, including piezoelectric platform scanning mode, galvanometer scanning mode, and composite processing mode. By the accurate control of laser power and scanning speed, polymerized line-arrays attached on substrate surfaces with 64 nm linewidth and a group of suspended lines with 30 nm linewidth are obtained in the experiments. The maximum fabricating speed of our system reaches 50 mm/s. It is suitable for the efficient manufacturing of a variety of planar and three-dimensional micro-nano structures, and it provides a powerful scientific research tool for many research fields of micro-nano optics, micro-nano electronics, biology, and other disciplines.

    Tools

    Get Citation

    Copy Citation Text

    Guozun Zhou, Minfei He, Zhenyao Yang, Chun Cao, Fei Xie, Yaoyu Cao, Cuifang Kuang, Xu Liu. Dual-Beam Laser Direct Writing Nano-Lithography System Based on Peripheral Photoinhibition Technology[J]. Chinese Journal of Lasers, 2022, 49(2): 0202001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: laser manufacturing

    Received: Apr. 1, 2021

    Accepted: Aug. 16, 2021

    Published Online: Dec. 1, 2021

    The Author Email: Kuang Cuifang (cfkuang@zju.edu.cn), Liu Xu (liuxu@zju.edu.cn)

    DOI:10.3788/CJL202249.0202001

    Topics