Acta Photonica Sinica, Volume. 51, Issue 9, 0914005(2022)

Fabrication Technology of Distributed Feedback Semiconductor Laser Based on Buried Metal Mask

Yu SHANG*, Jie FAN, Haizhu WANG, Yonggang ZOU, and Xiaohui MA
Author Affiliations
  • State Key Laboratory of High Power Semiconductor Laser,Changchun University of Science and Technology,Changchun 130022,China
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    Yu SHANG, Jie FAN, Haizhu WANG, Yonggang ZOU, Xiaohui MA. Fabrication Technology of Distributed Feedback Semiconductor Laser Based on Buried Metal Mask[J]. Acta Photonica Sinica, 2022, 51(9): 0914005

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    Paper Information

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    Received: Apr. 9, 2022

    Accepted: May. 26, 2022

    Published Online: Oct. 26, 2022

    The Author Email: Yu SHANG (3525547138@qq.com)

    DOI:10.3788/gzxb20225109.0914005

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