Acta Photonica Sinica, Volume. 51, Issue 9, 0914005(2022)
Fabrication Technology of Distributed Feedback Semiconductor Laser Based on Buried Metal Mask
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Yu SHANG, Jie FAN, Haizhu WANG, Yonggang ZOU, Xiaohui MA. Fabrication Technology of Distributed Feedback Semiconductor Laser Based on Buried Metal Mask[J]. Acta Photonica Sinica, 2022, 51(9): 0914005
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Received: Apr. 9, 2022
Accepted: May. 26, 2022
Published Online: Oct. 26, 2022
The Author Email: Yu SHANG (3525547138@qq.com)