Chinese Journal of Lasers, Volume. 34, Issue 8, 1055(2007)
Study on Stability of Selective Oxidation in Vertical Cavity Surface Emitting Laser
[4] [4] Marek Osinski, Tengiz Svimonishvili, Gennady A. Smolyakov et al.. Temperature and thickness dependence of steam oxidation of AlAs in cylindrical mesa structures [J]. IEEE Photon. Technol. Lett., 2001, 13(7):687~689
[5] [5] Kent D. Choquette, K. L. Lear, R. P. Schneider et al.. Fabrication and performance of selectively oxidized vertical-cavity lasers [J]. IEEE Photon. Technol. Lett., 1995, 7(11):1237~1239
[6] [6] M. Ochiai, G. E. Giudice, H. Temkin et al.. Kinetics of thermal oxidation of AlAs in water vapor [J]. Appl. Phys. Lett., 1996, 68(14):1898~1900
[8] [8] A. C. Alonzo, X. C. Cheng, T. C. McGill. Effect of cylindrical geometry on the wet thermal oxidation of AlAs[J]. J. Appl. Phys., 1998, 84(12):6901~6905
[11] [11] Li Ruoyuan, Wang Zhanguo, Xu Bo et al.. Wet oxidation of AlxGa1-xAs/GaAs distributed Bragg reflectors [J]. Chinese J. Semiconductors, 2005, 26(8):1519~1523
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on Stability of Selective Oxidation in Vertical Cavity Surface Emitting Laser[J]. Chinese Journal of Lasers, 2007, 34(8): 1055