Chinese Journal of Lasers, Volume. 23, Issue 9, 819(1996)
Diffraction Analysis on Deep-etch Continuous Phase Relief Microoptical Elements
This paper discusses the diffractive characteristics of the deep-etch continuousphase relief microoptical elements. The preliminary results about the ralationship betweenthe profiles of the deep-etch elements and the diffraction efficiency are presented. This mayprovide useful guidance for the fabrication of the elements.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Diffraction Analysis on Deep-etch Continuous Phase Relief Microoptical Elements[J]. Chinese Journal of Lasers, 1996, 23(9): 819
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