Optoelectronic Technology, Volume. 42, Issue 4, 318(2022)
Study on Uniformity of Cell Gap
Figures & Tables(13)
Fig. 2. Theoretical simulation on factors affecting uniformity of cell gap for different products
Fig. 3. The uniformity of parameters of PS between normal PS and XPS
Fig. 4. Measurement results of typical surface on normal PS, PSF and PSA
Fig. 6. Effect of thickness of normal OC and highly flat OC on gap between pixels and uniformity of cell gap
Table 1. The calculation of each parameter for theoretical simulation
View tableView in ArticleTable 1. The calculation of each parameter for theoretical simulation
分类 膜层 面积 膜厚 体积 显示区 阵列基板‑彩膜基板 Sp h=h5+h9+h0 VGG=Sp×h 栅极 S1 h1 VGate=S1×h1 绝缘层 S2 h2 VGI=S2×h2 有源层 S3 h3 VAct=S3×h3 源漏极 S4 h4 VSD=S4×h4 氧化铟锡 S5 h5 VITO=S5×h5 有机膜过孔 S6 h6 VORG=S6×h6 保护层过孔 S7 h7 VPVX=S7×h7 黑矩阵 S8 h8 VBM=S8×h8 色阻层 S9 h9=(hB+hB+hRB+hB+hGB)/3 VRGB=S9×h9 红蓝像素段差 - hRB - 绿蓝像素段差 - hGB - 蓝像素 - hB - 竖向黑矩阵与色阻交叠 S10 hPH VPH=S10×hPH 横向黑矩阵与色阻交叠 S11 hPW VPW=S11×hPW 主隔垫层 - - V主 辅助隔垫层 - - V辅 盒厚 - h0 - 显示区液晶体积 VAA=VGG-VGate-VGI-VAct-VSD-VITO+VORG+VPVX-VBM-VRGB-VPH-VPW-V主-V辅 非显示区液晶体积 框胶内边缘‑显示区 S12 h12 V非AA=S12×h12 液晶总体积 Vtotal=VAA+V非AA
Table 2. The range of each factor for theoretical simulation
View tableView in ArticleTable 2. The range of each factor for theoretical simulation
分类 参数 波动范围/μm 阵列基板 栅极膜厚 ±0.3 源漏极膜厚 ±0.36 绝缘层膜厚 ±0.25 氧化铟锡层膜厚 ±0.07 有机膜过孔 ±1 栅极线宽 ±1 源漏极线宽 ±1 氧化铟锡线宽 ±1 彩膜基板 主隔垫层线宽 ±3 辅助隔垫层线宽 ±3 黑矩阵线宽 ±2 竖向角段差 ±0.1 横向角段差 ±0.1 红蓝像素段差 ±0.1 蓝绿像素段差 ±0.1 隔垫层膜厚 ±0.05
Table 3. The difference of uniformity of cell gap between normal PS and XPS
View tableView in ArticleTable 3. The difference of uniformity of cell gap between normal PS and XPS
样品 隔垫层类型 段差/μm 盒厚工程能力指数 hRB hGB ±0.1 μm ±0.05 μm 1 交叉隔垫层 0.05 0.25 3.16 1.58 2 交叉隔垫层 0.25 0.1 3.17 1.58 3 普通隔垫层 0 0.25 2 1.57 4 普通隔垫层 0 0.25 2.06 1.03
Table 4. Effect of organic films on uniformity of cell gap
View tableView in ArticleTable 4. Effect of organic films on uniformity of cell gap
样品 条件 盒厚/μm 工程能力指数 工程能力指数差值 1 有机膜 3.21 2.64 0.65 2 无有机膜 3.32 1.99 3 有机膜 3.24 2.51 0.6 4 无有机膜 3.57 1.91
Table 5. Effect of altitude difference of pixels on uniformity of cell gap
View tableView in ArticleTable 5. Effect of altitude difference of pixels on uniformity of cell gap
分类 样品 红绿蓝像素膜厚/μm 工程能力指数 均值 非有机膜+零段差 1 2.38/2.38/2.38 1.4 1.6 2 1.72/1.72/1.72 1.47 3 2.38/2.38/2.38 1.83 4 1.72/1.72/1.72 1.67 5 1.72/1.72/1.72 1.61 非有机膜+低段差 6 2.45/2.4/2.45 1.45 1.63 7 1.85/1.8/2.0 1.73 8 2.8/2.9/2.8 1.7 有机膜+低段差 9 1.9/1.7/1.7 2.5 2.14 10 1.85/1.72/2.00 2 11 2.0/1.75/2.0 2.06 12 1.95/1.75/2.0 2 有机膜+高段差 13 2.8/2.9/2.85 1.62 1.29 14 2.0/1.7/1.9 1.39 15 2.81/2.95/2.76 1.15 16 2.6/2.85/2.85 1.05 17 2.98/2.87/2.78 1.24
Table 6. Effect of normal OC and highly flat OC on uniformity of cell gap
View tableView in ArticleTable 6. Effect of normal OC and highly flat OC on uniformity of cell gap
样品 条件 盒厚/μm 工程能力指数 工程能力指数差值 1 无平坦层 3.7 1.23 - 2 普通材料 3.75 1.43 0.2 3 高平坦性材料 3.74 1.74 0.51 4 无平坦层 3.79 1.15 - 5 普通材料 3.76 1.42 0.27 6 高平坦性材料 3.74 1.71 0.56
Table 7. Effect of two kinds of OC on uniformity of cell gap
View tableView in ArticleTable 7. Effect of two kinds of OC on uniformity of cell gap
平坦层材料 产品 像素设计段差/μm 平坦化后像素间段差/μm 角段差/μm 盒厚工程能力指数 hRB hGB hRG hRB hGB hRG hPH hPW 普通材料 1 0.1 -0.2 0.3 0.07 -0.15 0.22 0.4 0.43 1.33 2 -0.15 0.2 -0.35 -0.1 0.1 -0.2 0.49 0.46 1.05 3 0.05 0.19 -0.14 -0.02 0.12 -0.14 0.53 0.51 1.24 高平坦性材料 4 0.05 0.19 -0.14 -0.13 -0.09 -0.04 0.12 0.14 2.05 5 0.4 0.57 -0.17 -0.02 0.04 -0.06 0.16 0.17 1.67 6 -1 -0.4 -0.6 0.13 0.08 0.05 0.11 0.22 1.74
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Xingming WANG, Jun YANG, Zhonghao HUANG, Peng CAI, Chunjie WANG, Can ZHANG, Xin WANG, Guanzheng LI. Study on Uniformity of Cell Gap[J]. Optoelectronic Technology, 2022, 42(4): 318
Paper Information
Category: Research and Trial-manufacture
Received: Jul. 11, 2022
Accepted: --
Published Online: Dec. 23, 2022
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