Piezoelectrics & Acoustooptics, Volume. 44, Issue 2, 215(2022)
Extraction Method of Mason Model Parameters of Thin Film Bulk Acoustic Resonator
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ZHANG Bizhuang, TANG Xiaolong, JIANG Pingying, LI Huali, LIAO Shudan, LIU Ya, LIU Fan. Extraction Method of Mason Model Parameters of Thin Film Bulk Acoustic Resonator[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 215
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Received: Mar. 18, 2022
Accepted: --
Published Online: Jun. 14, 2022
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