In order to correctly analyze and design thin film bulk acoustic wave resonator(FBAR), it is necessary to accurately extract the parameters(such as electromechanical coupling coefficient, dielectric parameters and viscosity coefficient etc, ) of FBAR resonator in the Mason model, Through the simple harmonic approximation, the transverse component of the displacement in the thickness direction is introduced into the Mason model to improve the accuracy of the model, Using the scattering parameters of open and short graphics, the equivalent circuit parameters of probe and test pad are extracted to de-embed the resonator, The filter with center frequency of 5, 43 GHz is simulated with the fitted model parameters, The results show that the simulation results of the mode parameters extracted by this method are in good agreement with the passband shape of the probe test curve of the filter,