Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error

Taojie Li; Peng Wu; Zheng Yang; Shaoyun Yin; Chunlei Du; Yuefeng Wang

doi:10.3788/AOS201737.1011003

Acta Optica Sinica, Volume. 37, Issue 10, 1011003(2017)

Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error

Taojie Li^1,2,3, Peng Wu^2,3, Zheng Yang^2,3, Shaoyun Yin^2,3, Chunlei Du^2,3, and Yuefeng Wang^1、*

¹ 1 Department of Electronic and Optical Engineering, Ordnance Engineering College, Chinese People′s Liberation Army, Shijiazhuang, Heibei 050003, China

² System Integration Center of Optics and Electronics, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China

³ Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China

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Taojie Li, Peng Wu, Zheng Yang, Shaoyun Yin, Chunlei Du, Yuefeng Wang. Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error[J]. Acta Optica Sinica, 2017, 37(10): 1011003

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Paper Information

Category: Imaging Systems

Received: Apr. 27, 2017

Accepted: --

Published Online: Sep. 7, 2018

The Author Email: Yuefeng Wang (wyf_gx110@sina.com)

DOI:10.3788/AOS201737.1011003

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