Laser & Optoelectronics Progress, Volume. 59, Issue 17, 1714002(2022)

Fabrication of Medical Titanium Alloy Microhole Array Substrates Based on High-Speed Polygon Mirror

Shipeng Liu*, Fengxi Li, Zhenhong Xing, Bingjun Cui, and Shuyi Dai
Author Affiliations
  • Jinan Senfeng Laser Technology Co., Ltd., Jinan 250011, Shandong , China
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    Figures & Tables(13)
    Test setup diagram. (a) Experimental processing system; (b) high-speed polygon mirror scanning device
    Relationship between burning aperture and logarithm of power
    Variation of burning aperture with increasing laser power
    Variation curves of hole inlet diameter, outlet diameter, and hole taper of 0.1 mm titanium alloy with laser incident power
    Variation of laser drilling depth and morphology with increasing laser power
    High-speed polygon mirror laser processing 0.3 mm titanium alloy micro group holes substrate. (a) Microhole arrays arrangement; (b) microhole arrays dislocation arrangement
    Variation of hole morphology with scanning speed. (a) Scanning speed is 160 m/s; (b) scanning speed is 500 m/s
    Medical titanium alloy microhole substrate covered and filled with povidone
    Quincunx spot structure
    Aperture comparison before and after process optimization. (a) Before optimization; (b) after optimization
    • Table 1. Specific parameters of laser

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      Table 1. Specific parameters of laser

      Maximum input power /WLaser pulse frequency /MHzLaser pulse width /nsSingle pulse energy /mJ
      5000.5001201.00
      5000.5002401.00
      5001.000600.50
      5002.000300.25
    • Table 2. Specific parameters of scanning device

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      Table 2. Specific parameters of scanning device

      Maximum scanning speed /(m·s-1f-θ lens focal length /mmScanning range /(mm×mm)Repeatability /μmFocus spot /μm
      1000420300×300±535
    • Table 3. Efficiency of micro group holes processed by the high-speed polygon mirror

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      Table 3. Efficiency of micro group holes processed by the high-speed polygon mirror

      Scanning speed /(m·s-1Scanning range /(mm×mm)Hole spacing / mmNumber of scansPunch time /s
      100100×1000.24051
      160100×1000.32404
      250100×1000.54020
      500100×1001.04010
      800100×1001.6405
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    Shipeng Liu, Fengxi Li, Zhenhong Xing, Bingjun Cui, Shuyi Dai. Fabrication of Medical Titanium Alloy Microhole Array Substrates Based on High-Speed Polygon Mirror[J]. Laser & Optoelectronics Progress, 2022, 59(17): 1714002

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Nov. 15, 2021

    Accepted: Dec. 27, 2021

    Published Online: Aug. 22, 2022

    The Author Email: Shipeng Liu (lsp15650078976@163.com)

    DOI:10.3788/LOP202259.1714002

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