[1] [1] DONG H J, LI T J, WANG Z W, et al.Design and experiment of a piezoelectric actuator based on inchworm working principle［J］.Sensors and Actuators A:Physical, 2020, 306:111950.

[2] [2] HUANG Z B, SHI S J, CHEN W S, et al.Development of a novel spherical stator multi-DOF ultrasonic motor using in-plane non-axisymmetric mode［J］.Mechanical Systems and Signal Processing, 2020, 140:106658.

[3] [3] HUO Z C, TIAN Y L, WANG F J, et al.A dual-driven high precision rotary platform based on stick-slip principle［J］.IEEE/ASME Trans.Mechatron, 2022, 27:3053-3064.

[5] [5] ZHANG S J, LIU Y X, DENG J, et al.Development of a two-DOF inertial rotary motor using a piezoelectric actuator constructed on four bimorphs［J］.Mechanical Systems and Signal Processing, 2021, 149:107213.

[6] [6] ZHANG Y K, WANG M L, CHENG Y, et al.A stick-slip/inchworm hybrid rotary piezo motor based on a symmetric triangular driving mechanism［J］.Applied Physics Letters, 2019, 115:131904.

[7] [7] WANG Y R, XU Z, HUANG H.A novel stick-slip piezoelectric rotary actuator designed by employing a centrosymmetric flexure hinge mechanism［J］.Smart Materials and Structures, 2020, 29:125006.

[8] [8] WANG S P, RONG W B, WANG L F, et al.A long range piezoelectric rotary motor with continuous output:Design, analysis and experimental performance［J］.Sensors and Actuators A:Physical, 2017, 263:179-187.