Chinese Optics Letters, Volume. 2, Issue 6, 06328(2004)

Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates

Dailin Li*, Xiangzhao Wang, and Yingming Liu
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
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    References(7)

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    CLP Journals

    [1] [in Chinese], [in Chinese], [in Chinese], "Study on silicon micro-resonators by using a novel optical excitation and detection apparatus," Chin. Opt. Lett. 4, 309 (2006)

    [2] [in Chinese], [in Chinese]. A Single Optical Source System for Exciting and Detecting the Vibration of Silicon Microresonator Sensors[J]. Chinese Journal of Lasers, 2006, 33(12): 1661

    [3] [in Chinese], [in Chinese]. Analysis of Modulation Frequency in Sinusoidal Phase Modulating Interferometry for Displacement Measurement[J]. Chinese Journal of Lasers, 2006, 33(11): 1574

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    Dailin Li, Xiangzhao Wang, Yingming Liu, "Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates," Chin. Opt. Lett. 2, 06328 (2004)

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    Paper Information

    Category: Instrumentation, measurement, and metrology

    Received: Mar. 15, 2004

    Accepted: --

    Published Online: Jun. 6, 2006

    The Author Email: Dailin Li (ldl@siom.ac.cn)

    DOI:

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